Thermal Isolation with Porous Silicon Technology and the Application in the Micro-sensors

Abstract

Abstract: The thermal conductivity performance of porous silicon and the influence such as aperture, porosity and oxidation treatment are introduced. The state of art of thermal isolation with porous silicon technologies are presented, especially the step current method and pulse current method. It is thought that the pulse current methods will be used abroad because of their special superiorities. Porous silicon has been used broadly in the fields of micro-sensors because of its special thermal isolation performance and advantages in technology.

Key words: porous silicon, thermal isolation, thermal conductivity, micro-sensor

CLC Number:

TN402

TIAN Bin,HU Ming. Thermal Isolation with Porous Silicon Technology and the Application in the Micro-sensors[J]. Journal of Inorganic Materials.

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