CVD自支撑金刚石薄膜中的宏观织构与微观孪晶

无机材料学报

CVD自支撑金刚石薄膜中的宏观织构与微观孪晶

毛卫民^1,2, 朱宏喜¹, 陈冷¹, 冯惠平¹, 吕反修³

北京科技大学 1. 材料学系; 2. 新金属材料国家重点实验室; 3. 功能材料研?究所; 北京 100083

收稿日期:2004-11-18 修回日期:2005-01-05 出版日期:2006-01-20 网络出版日期:2006-01-20

Macro-texture and Micro-twins in Free-standing Diamond Films

MAO Wei-Min^1,2, ZHU Hong-Xi¹, CHEN Leng¹, FENG Hui-Ping¹, LU Fan-Xiu³

1. Department of Materials; 2. State Key Laboratory of Advanced Metals and Materials; 3. Institute of Functional Materials,
University of Science and Technology Beijing, Beijing 100083, China

Received:2004-11-18 Revised:2005-01-05 Published:2006-01-20 Online:2006-01-20

摘要/Abstract

摘要： 采用背散射电子取向成像、扫描电镜、X射线衍射等手段研究了CVD自支撑金刚石膜的宏观织构、微观组织及晶粒取向的演化过程. 薄膜制备时的气氛纯度较低, 这是引起本文金刚石膜中发现大量孪晶的一个重要原因. 杂质原子会降低金刚石的层错能, 从而降低孪晶界的形成障碍, 促进孪晶生成. 频繁的孪晶导致{100}织构转向{122}织构, 并弱化薄膜织构, 使性能趋向各向同性. {110}取向的晶粒孪晶后仍具有{110}取向, 因而在多重孪晶出现时仍可保持一定的稳定性.

关键词: 金刚石膜, 织构, 微观结构, 孪晶

Abstract: The techniques of orientation mapping based on electron back-scattering diffraction, scanning electron microscopy and X ray diffraction were used to investigate macro-texture,
microstructure and orientation evolution of grains. The preparation atmosphere with lower purity is one of the important reasons, which
induces twins in large quantity in the diamond films investigated. The impurity atoms reduce the stack fault energy in diamond, lower the
obstacles to the formation of twin boundaries, and therefore accelerate the appearance of twins. Frequent twining results in the texture
transformation from {100} to {122}, a weakened film texture as well as the tendency leading to isotropic properties. The {110} oriented
grains keep their orientation after twinning, and therefore indicate certain orientation stability against the repeatedly twinning effects.

Key words: diamond film, texture, microstructure, twins

中图分类号:

TB43

毛卫民,朱宏喜,陈冷,冯惠平,吕反修. CVD自支撑金刚石薄膜中的宏观织构与微观孪晶[J]. 无机材料学报.

MAO Wei-Min,ZHU Hong-Xi,CHEN Leng,FENG Hui-Ping,LU Fan-Xiu. Macro-texture and Micro-twins in Free-standing Diamond Films[J]. Journal of Inorganic Materials.

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