皮秒激光加工的微织构对碳化硅润湿性的影响

doi:10.15541/jim20230073

无机材料学报 ›› 2023, Vol. 38 ›› Issue (8): 923-930.DOI: 10.15541/jim20230073 CSTR: 32189.14.10.15541/jim20230073

皮秒激光加工的微织构对碳化硅润湿性的影响

徐昊¹(), 钱伟²^,³, 花银群¹^,²^,³(), 叶云霞³^,⁴, 戴峰泽³, 蔡杰²^,³

1.江苏大学新材料研究院, 镇江 212013
2.江苏大学先进制造与现代装备技术研究所, 镇江 212013
3.江苏大学机械工程学院, 镇江 212013
4.江苏大学微纳光电子与太赫兹技术研究所, 镇江 212013

收稿日期:2023-02-14 修回日期:2023-04-05 出版日期:2023-08-20 网络出版日期:2023-05-04
通讯作者: 花银群, 教授. E-mail: huayq@ujs.edu.cn
作者简介:徐昊(1997-), 男, 硕士研究生. E-mail: 1574686698@qq.com
基金资助:
国家自然科学基金(51641102)

Effects of Micro Texture Processed by Picosecond Laser on Hydrophobicity of Silicon Carbide

XU Hao¹(), QIAN Wei²^,³, HUA Yinqun¹^,²^,³(), YE Yunxia³^,⁴, DAI Fengze³, CAI Jie²^,³

1. Institute for Advanced Material, School of Materials Science and Engineering, Jiangsu University, Zhenjiang 212013, China
2. Institute of Advanced Manufacturing and Modern Equipment Technology, Jiangsu University, Zhenjiang 212013, China
3. School of Mechanical Engineering, Jiangsu University, Zhenjiang 212013, China
4. Institute of Micro-Nano Optoelectronics and Terahertz Technology, Jiangsu University, Zhenjiang 212013, China

Received:2023-02-14 Revised:2023-04-05 Published:2023-08-20 Online:2023-05-04
Contact: HUA Yinqun, professor. E-mail: huayq@ujs.edu.cn
About author:XU Hao (1997-), male, Master candidate. E-mail: 1574686698@qq.com
Supported by:
National Natural Science Foundation of China(51641102)

摘要/Abstract

摘要：

为改善碳化硅的表面润湿性能, 本研究利用脉冲激光加工表面处理和化学改性分别改善了碳化硅的表面形貌和表面能。实验选用皮秒激光加工方式构造表面微织构, 利用激光共聚焦显微镜分析了微织构的微观形貌, 并进一步分析了烧蚀形态与激光自身特性和加工参数之间的联系。研究发现, 激光加工效果以烧蚀为主, 重熔为辅, 而由于碳化硅烧蚀阈值和激光能量在光斑中的高斯分布特性, 形成的微织构的烧蚀凹槽呈倒三角形。此外, 选用的氟硅烷修饰剂使碳化硅表面从亲水表面转变为疏水表面; 通过改变加工参数获得不同微织构并进行氟硅烷修饰后, 碳化硅表面接触角最大提高到157°, 达到了超疏水效果。为了进一步探讨微织构对疏水性的影响原理, 提出了一个基于实际形貌参数的固液接触角模型。该模型阐释了接触角随微织构特征参数变化的机制, 固、气、液两两之间的接触面积影响了表面润湿性, 这为寻找具有最佳疏水性能的微织构提供了新的理论指导。

关键词: 碳化硅, 微织构, 疏水性, 皮秒激光加工

Abstract:

To enhance the surface morphology and surface energy of silicon carbide to improve its surface wetting properties, picosecond pulsed laser surface treatment and chemical modification techniques were used, respectively. Additionally, a confocal laser microscope was used to analyze the microfabrication microstructure and the relationship between ablation pattern, laser properties, and processing parameters. Results demonstrated that ablation and remelting were the dominant factors influencing the laser processing effect. An inverted triangle-shaped ablation groove was observed due to ablation threshold of silicon carbide and Gaussian distribution of laser energy in the spot. Fluoroalkyl silane modifier used in the experiments could transform the silicon carbide surface from hydrophilic to hydrophobic. By varying processing parameters of pulsed laser treatment, contact angle of the modified silicon carbide surface increased to a maximum of 157°. To better understand the effect of micro-textures on hydrophobicity, we developed a solid-liquid contact angle model based on the actual morphological parameters which elucidated the mechanism of contact angle variation with characteristic parameters of micro-textures, providing theoretical guidance for finding micro-textures with optimal hydrophobic performance.

Key words: silicon carbide, micro-texture, hydrophobicity, picosecond laser processing

中图分类号:

TQ174

徐昊, 钱伟, 花银群, 叶云霞, 戴峰泽, 蔡杰. 皮秒激光加工的微织构对碳化硅润湿性的影响[J]. 无机材料学报, 2023, 38(8): 923-930.

XU Hao, QIAN Wei, HUA Yinqun, YE Yunxia, DAI Fengze, CAI Jie. Effects of Micro Texture Processed by Picosecond Laser on Hydrophobicity of Silicon Carbide[J]. Journal of Inorganic Materials, 2023, 38(8): 923-930.

图/表 12

图1 激光加工系统(a)及其加工路径(b)

Fig. 1 Laser processing system (a) and corresponding processing paths (b)

表1 皮秒激光加工参数

Table 1 Processing parameters of laser processing

Serial number	Power/ W	Speed/ (mm·s^-1)	Interval/ μm
A-1~A-10	9	125	64/80/100/125/150/
A-1~A-10	9	125	200/250/300/400/500
B-1~B-10	6	100	64/80/100/125/150/
B-1~B-10	6	100	200/250/300/400/500
C-1~C-10	3	50	64/80/100/125/150/
C-1~C-10	3	50	200/250/300/400/500

图2 激光加工后碳化硅表面的微观纹理

Fig. 2 Micro-textures of laser processed SiC surface

图3 样品R-0和A-1表面的XRD图谱

Fig. 3 XRD patterns for sample R-0 and A-1

图4 样品C-4表面形貌的3D图(a)及其对应的横截面形状(b)

Fig. 4 Surface morphology of laser confocal 3D model (a) and corresponding cross-sectional shape (b) of sample C-4

图5 表面形貌特征的参数分析

Fig. 5 Parametric analyses of morphological features (a) Depth of groove; (b) Width of groove

图6 样品A-1表面形貌的图像、3d图和对应横截面

Fig. 6 Surface morphologies of A-1 (a) Photograph of laser machined reticular micro-texture; (b) Laser confocal 3D model; (c) Cross-sectional shape of (b)

图7 修饰对接触角的影响及修饰过程中的水解缩合

Fig. 7 Effect of modification on contact angle and its modification principle (a) Contact angle of R-0; (b) Contact angle of R-1; (c) Hydrolysis of FAS; (d) Dehydration condensation

图8 三组样品的接触角变化和图像

Fig. 8 Statistics and photographs of contact angle for samples (a) Contact angles of three groups with processing intervals; (b) Contact angle photographs of three groups

图9 接触角模型的改良方法和沟槽内渗入水的受力分析

Fig. 9 Improvement of contact angle model and its force analysis of infiltrated water in the groove

图10 微观纹理的形态特征参数

Fig. 10 Morphological parameters of micro-texture (a) Micro grooves; (b) Micro-texture area; (c) Solid-liquid contact area of infiltrated water

图11 理论接触角变化和两组样品的拟合预测曲线

Fig. 11 Theoretical contact angle variation and fitted curves (a) Theoretical variation of contact angle; (b) Fitted curve of variation of contact angle of group B; (c) Fitted curve of variation of contact angle of group C

参考文献 35

[1]	KHADER I, KOPLIN C, SCHRÖDER C, et al. Characterization of a silicon nitride ceramic material for ceramic springs. Journal of the European Ceramic Society, 2020, 40(10): 3541. DOI URL
[2]	KHADER I, RENZ A, KAILER A, et al. Thermal and corrosion properties of silicon nitride for copper die casting components. Journal of the European Ceramic Society, 2013, 33(3): 593. DOI URL
[3]	BREYSSE J, CASTEL D, LAVIRON B, et al. All-SiC telescope technology: recent progress and achievements. International Conference on Space Optics — ICSO 2004, 2019: 201.
[4]	SPITSBERG I, STEIBEL J. Thermal and environmental barrier coatings for SiC/SiC CMCs in aircraft engine applications. International Journal of Applied Ceramic Technology, 2005, 1(4): 291. DOI URL
[5]	KOUCHAKI S, ROSHANI H, PROZZI J A, et al. Evaluation of aggregates surface micro-texture using spectral analysis. Construction and Building Materials, 2017, 156: 944. DOI URL
[6]	TIEJUN Z, NAN W. Analysis of the research status of surface texture technology. Mechanical & Electrical Engineering Technology, 2020, 49(11): 116.
[7]	NEINHUIS C, BARTHLOTT W. Characterization and distribution of water-repellent, self-cleaning plant surfaces. Annals of Botany, 1997, 79(6): 667. DOI URL
[8]	DAVIS A, YEONG Y H, STEELE A, et al. Superhydrophobic nanocomposite surface topography and ice adhesion. ACS Applied Materials & Interfaces, 2014, 6(12): 9272.
[9]	QU N, CHEN X, LI H, et al. Electrochemical micromachining of micro-dimple arrays on cylindrical inner surfaces using a dry-film photoresist. Chinese Journal of Aeronautics, 2014, 27(4): 1030. DOI URL
[10]	SUN Y, JIN L, GONG Y, et al. Experimental evaluation of surface generation and force time-varying characteristics of curvilinear grooved micro end mills fabricated by EDM. Journal of Manufacturing Processes, 2022, 73: 799. DOI URL
[11]	NAKANO M, KORENAGA A, KORENAGA A, et al. Applying micro-texture to cast iron surfaces to reduce the friction coefficient under lubricated conditions. Tribology Letters, 2007, 28(2): 131. DOI URL
[12]	OBIKAWA T, KAMIO A, TAKAOKA H, et al. Micro-texture at the coated tool face for high performance cutting. International Journal of Machine Tools and Manufacture, 2011, 51(12): 966. DOI URL
[13]	SCARAGGI M, MEZZAPESA F P, CARBONE G, et al. Friction properties of lubricated laser-microtextured-surfaces: an experimental study from boundary-to hydrodynamic-lubrication. Tribology Letters, 2012, 49(1): 117. DOI URL
[14]	ZHAO B, LI P, ZHAO C, et al. Fractal characterization of surface microtexture of Ti₆Al₄V subjected to ultrasonic vibration assisted milling. Ultrasonics, 2020, 102: 106052.
[15]	MA C, BAI S, PENG X, et al. Improving hydrophobicity of laser textured SiC surface with micro-square convexes. Applied Surface Science, 2013, 266: 51. DOI URL
[16]	ZHAO M, HE Q, LEI B, et al. Preparation of ceramic superhydrophobic surface based on laser engraving technology. Journal of China Three Gorges University (Natural Sciences), 2021, 43(1): 107.
[17]	WANG S, JIANG L. Definition of superhydrophobic states. Advanced Materials, 2007, 19(21): 3423. DOI URL
[18]	BICO J, THIELE U, QUÉRÉ D. Wetting of textured surfaces. Colloids and Surfaces A: Physicochemical and Engineering Aspects, 2002, 206(1): 41. DOI URL
[19]	KANG C, LU H, YUAN S, et al. Superhydrophilicity/superhydrophobicity of nickel micro-arrays fabricated by electroless deposition on an etched porous aluminum template. Chemical Engineering Journal, 2012, 203: 1. DOI URL
[20]	ZHAI Z, WEI C, ZHANG Y, et al. Investigations on the oxidation phenomenon of SiC/SiC fabricated by high repetition frequency femtosecond laser. Applied Surface Science, 2020, 502:144131.
[21]	FU C, YANG Y, HUANG Z, et al. Investigation on the laser ablation of SiC ceramics using micro-Raman mapping technique. Journal of Advanced Ceramics, 2016, 5(3): 253. DOI URL
[22]	DENG D, XIE Y, CHEN L, et al. Experimental investigation on laser micromilling of SiC microchannels. The International Journal of Advanced Manufacturing Technology, 2019, 101(1): 9. DOI
[23]	TEMMLER A, KÜPPER M, WALOCHNIK M A, et al. Surface structuring by laser remelting of metals. Journal of Laser Applications, 2017, 29(1): 012015.
[24]	ZHAI Z, WANG W, ZHAO J, et al. Influence of surface morphology on processing of C/SiC composites via femtosecond laser. Composites Part A: Applied Science and Manufacturing, 2017, 102: 117. DOI URL
[25]	ZHANG M, ZHU H, XI B, et al. Surface hydrophobic modification of biochar by silane coupling agent KH-570. Processes, 2022, 10(301): 301. DOI URL
[26]	WU X L, XIONG S J, ZHU J, et al. Identification of surface structures on 3C-SiC nanocrystals with hydrogen and hydroxyl bonding by photoluminescence. Nano Letters, 2009, 9(12): 4053. DOI URL
[27]	SONG J, ROJAS O J. Approaching super-hydrophobicity from cellulosic materials: a review. Nordic Pulp and Paper Research Journal, 2013, 28(2): 216. DOI URL
[28]	LAW K Y. Definitions for hydrophilicity, hydrophobicity, and superhydrophobicity: getting the basics right. Journal of Physical Chemistry Letters, 2014, 5(4): 686. DOI URL
[29]	SEDEV R. Surface tension, interfacial tension and contact angles of ionic liquids. Current Opinion in Colloid & Interface Science, 2011, 16(4): 310. DOI URL
[30]	CRICK C R, PARKIN I P. Preparation and characterisation of super-hydrophobic surfaces. Chemistry, 2010, 16(12): 3568.
[31]	HAN T Y, SHR J F, WU C F, et al. A modified Wenzel model for hydrophobic behavior of nanostructured surfaces. Thin Solid Films, 2007, 515(11): 4666. DOI URL
[32]	WOLANSKY G, MARMUR A. Apparent contact angles on rough surfaces: the Wenzel equation revisited. Colloids and Surfaces A: Physicochemical and Engineering Aspects, 1999, 156(1): 381. DOI URL
[33]	YEN T H, SOONG C Y. Hybrid Cassie-Wenzel model for droplets on surfaces with nanoscale roughness. Physical Review E, 2016, 93(2): 22805. DOI URL
[34]	XU X, WANG X. Derivation of the Wenzel and Cassie equations from a phase field model for two phase flow on rough surface. SIAM Journal on Applied Mathematics, 2010, 70(8): 2929. DOI URL
[35]	NAKAYAMA Y. Introduction to Fluid Mechanics(2nd Edition). Britain: Butterworth-Heinemann, 2018: 25.

皮秒激光加工的微织构对碳化硅润湿性的影响

Effects of Micro Texture Processed by Picosecond Laser on Hydrophobicity of Silicon Carbide

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