高级检索
无机材料学报

无机材料学报

• 研究论文 • 上一篇    下一篇

空心阴极等离子烧结AlN陶瓷

段成军^{1,2, 王群^1, 王从曾^1, 高帆^1, 赵景泰^2   

  1. 1. 北京工业大学材料学院功能材料国家重点实验室, 北京 100022; 2. 中国科学院上海硅酸盐研究所高性能陶瓷与超微结构国家重点实验室, 上?海 200050
  • 收稿日期:2003-09-10 修回日期:2003-10-21 出版日期:2004-09-20 网络出版日期:2004-09-20

DUAN Cheng-Jun1,2, WANG Qun1, WANG Cong-Zeng1, GAO Fan1, ZHAO Jing-Tai2   

  1. 1．State Key Laboratory of Functional Materials, Material Academy of Beijing Polytechnic University, Beijing 100022, China; 2．State
    Key Laboratory of High performance Ceramic and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China
  • Received:2003-09-10 Revised:2003-10-21 Published:2004-09-20 Online:2004-09-20

PDF (PC)

1051

被引次数

13

摘要： 将空心阴极效应运用于AlN陶瓷的烧结, 选用自蔓延高温合成的AlN粉体为原料, 用 Y2O3-CaO-Li2O作为烧结助剂, 制备出了致密度高, 导热性能好的AlN陶瓷. 在添加5.5wt% 的Y2O3-CaO-Li2O
(Y2O3:Li2O:CaO=44:6:5wt%)作为烧结助剂, 在1700℃, 保温3h的烧结条件下, 获得相对密度为98.89%, 热导率为93.8 W/(m·K)AlN烧结体. 烧结体的断口SEM照片显示烧结试样的晶粒生长发育完善, 晶粒轮廓清晰呈尖锐的多面体形状, 晶粒大小均匀, 气孔和晶界相少, 断裂模式为穿晶断裂. TEM表明: 晶界相少, 且大部分都缩至三角晶界, AlN颗粒与颗粒接触紧密.

关键词: 氮化铝, 空心阴极等离子, 热导率, 致密度

Abstract: In this paper, the effect of hollow cathode discharge was applied to the sintering of AlN ceramic, AlN
ceramics with high performances of high density and excellent conductivity were obtained with AlN powder as the raw material which was produced
by the method of SHS and Y2O3-CaO-Li2O as the additive. The densities of samples sintered at 1700℃ reached the highest relative density of 98.89% after holding 3h, the amount of the sintering
additive was 5.5 wt%(Y2O3:Li2O:CaO=44:6:5wt/%), thermal conductivity was 93.8 W/(m·K) .The SEM photograph of the fractured
surface showed that the AlN grains grew perfectly and had clear, sharp-edge and multilateral morphology, grain boundary phase and pores were little,
fracture mode was intercrystalline fracture. TEM showed that AlN phase was contiguous , boundary phase was little and consisted in triangle grain boundary.

Key words: aluminium nitride, hollow cathode discharge plasma, conductivity, density

中图分类号: