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无机材料学报

无机材料学报

• 研究论文 • 上一篇    下一篇

LiCl/SiO2-Al2O3薄膜的纳米结构和湿敏特性

赵鹏1; 翟继卫1; 张良莹1,2; 姚熹1,2   

  1. 1. 西安交通大学电子材料研究所; 西安 710049; 2. 同济大学功能材料研究所; 上海 200092
  • 收稿日期:1999-01-26 修回日期:1999-03-17 出版日期:1999-12-20 网络出版日期:1999-12-20

Humidity Sensing Property of LiCl/SiO2-Al2O3 Nano-Composite Film

ZHAO Peng1; ZHAI Ji-Wei1; ZHANG Liang-Ying1,2; YAO Xi 1,2   

  1. 1. Electronic Materials Research Laboratory; Xi an Jiaotong University; Xi an 710049; China; 2. Functional Materials Research Laboratory; Tongji University; Shanghai 200092; China
  • Received:1999-01-26 Revised:1999-03-17 Published:1999-12-20 Online:1999-12-20

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摘要： 通过溶胶－凝胶工艺制得具有良好湿敏特性的LiCl／SiO2－Al2O3薄膜材料，利用XRD和AFM对这类薄膜进行了结构表征．结果表明，具有纳米分相结构的薄膜在全湿范围内阻抗值的变化＞3个数量级，阻抗的对数值与相对湿度的关系具有较好的线性度，吸湿响应＜30s，脱湿响应＜60s．

关键词: 氯化锂, 薄膜, 湿敏

Abstract: LiCl/SiO2-Al2O3 films with good humidity sensing properties were prepared by sol-gel process. The film structure was investigated by using XRD and AFM. The results indicated that the impedance variety of the film with nano-phase separation structure was more than 3 order of magnitude, and there was a better linear relationship between logarithmic impedance and relative humidity; the moisture absorption response and dehydration response of this film were less than 30s and 60s respectively.

Key words: lithium chlorinate, thin film, nano-composite, humidity sensor

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