Journal of Inorganic Materials ›› 2018, Vol. 33 ›› Issue (11): 1173-1178.doi: 10.15541/jim20180027

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Characterization of Tetrahedral Amorphous Carbon Film with Various Thickness by High Through-put Method

Jing WEI1,2(), Han-Chao LI1,3, Pei-Ling KE1, Ai-Ying WANG1()   

  1. 1. Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Key Laboratory of Marine Materials and Related Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China
    2. University of Chinese Academy of Sciences, Beijing 100049, China
    3. Sohool of Physical Science and Technology, Shanghai Tech University, Shanghai 201210, China
  • Received:2018-01-16 Revised:2018-03-09 Online:2018-11-16 Published:2018-10-20
  • About author:WEI Jing. E-mail:
  • Supported by:
    National Natural Science Foundation of China (51522106);Zhejiang Key Research and Development Program (2017C01001);Public Projects of Zhejiang Province (2016C31121)


Materials Genome Initiative (MGI), which greatly accelerates the research and development progress of new materials with reduced cost, has received widespread attention in recent years. In this report, high-quality ta-C films with different thicknesses, ranging from 4.7 nm to 183 nm, were high through-put deposited by a home-built double 45° bent filtered cathodic vacuum arc system, which was realized by the control of carbon plasma beam and substrate position. Meanwhile, the effects of film thickness on surface roughness, microstructure, and carbon atomic bond were investigated by atomic force microscope, spectroscopic ellipsometry, Raman spectra and X-ray photoelectron spectroscopy. Results show that the high through-put method by regulation of carbon plasma beam and selective placement of substrate enables to prepare ta-C films with various thicknesses. Particularly, the prepared ta-C films show almost constant smooth surface (Ra=(0.38±0.02) nm) and the value of Disp(G) regardless of the thickness changes, revealing the unchanged size of sp2 cluster and sp3 content with different thicknesses. Furthermore XPS results confirm that sp3 relative content is kept at (55±5)%. In addition, the optical band gaps of ta-C films with different thicknesses remain at (1.02±0.08) eV. These results could provide new insight into design and fabricate the controlled microstructure and optical property of ta-C film with different thicknesses.

Key words: tetrahedral amorphous carbon film, high through-put, thickness, microstructure, optical band gap

CLC Number: 

  • TQ127