Synthesis of SiC Ultrafine Powders by Thermal Decomposition of LPS

Abstract

Abstract: Fine amorphous silicon carbide powders were prepared by vapor phase decomposition fromthe low-molecular polysilane(LPS). The pyrolysis mechanism of LPS under Ar atmosphere andthe influence of the pyrolysis conditions (temperature, duration, LPS and Ar gas flowing rate)were discussed. The silicon carbide fine powder less than 0.1μm obtAlNed after pyrolysis processis amorphous with 34%~35% carbon and 3%~4% oxygen.

Key words: silicon carbide, fine powder, amorphous, vapor phase decomposition, low-molecularpolysilane

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XIE Kai,ZHANG Changrui,CHEN Chaohui,ZHOU Anchen,PAN Yi. Synthesis of SiC Ultrafine Powders by Thermal Decomposition of LPS[J]. Journal of Inorganic Materials.

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References

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