Effects of Micro Texture Processed by Picosecond Laser on Hydrophobicity of Silicon Carbide

doi:10.15541/jim20230073

Abstract

Abstract:

To enhance the surface morphology and surface energy of silicon carbide to improve its surface wetting properties, picosecond pulsed laser surface treatment and chemical modification techniques were used, respectively. Additionally, a confocal laser microscope was used to analyze the microfabrication microstructure and the relationship between ablation pattern, laser properties, and processing parameters. Results demonstrated that ablation and remelting were the dominant factors influencing the laser processing effect. An inverted triangle-shaped ablation groove was observed due to ablation threshold of silicon carbide and Gaussian distribution of laser energy in the spot. Fluoroalkyl silane modifier used in the experiments could transform the silicon carbide surface from hydrophilic to hydrophobic. By varying processing parameters of pulsed laser treatment, contact angle of the modified silicon carbide surface increased to a maximum of 157°. To better understand the effect of micro-textures on hydrophobicity, we developed a solid-liquid contact angle model based on the actual morphological parameters which elucidated the mechanism of contact angle variation with characteristic parameters of micro-textures, providing theoretical guidance for finding micro-textures with optimal hydrophobic performance.

Key words: silicon carbide, micro-texture, hydrophobicity, picosecond laser processing

CLC Number:

TQ174

XU Hao, QIAN Wei, HUA Yinqun, YE Yunxia, DAI Fengze, CAI Jie. Effects of Micro Texture Processed by Picosecond Laser on Hydrophobicity of Silicon Carbide[J]. Journal of Inorganic Materials, 2023, 38(8): 923-930.

Figures/Tables 12

Fig. 1 Laser processing system (a) and corresponding processing paths (b)

Table 1 Processing parameters of laser processing

Serial number	Power/ W	Speed/ (mm·s^-1)	Interval/ μm
A-1~A-10	9	125	64/80/100/125/150/
A-1~A-10	9	125	200/250/300/400/500
B-1~B-10	6	100	64/80/100/125/150/
B-1~B-10	6	100	200/250/300/400/500
C-1~C-10	3	50	64/80/100/125/150/
C-1~C-10	3	50	200/250/300/400/500

Fig. 2 Micro-textures of laser processed SiC surface

Fig. 3 XRD patterns for sample R-0 and A-1

Fig. 4 Surface morphology of laser confocal 3D model (a) and corresponding cross-sectional shape (b) of sample C-4

Fig. 5 Parametric analyses of morphological features (a) Depth of groove; (b) Width of groove

Fig. 6 Surface morphologies of A-1 (a) Photograph of laser machined reticular micro-texture; (b) Laser confocal 3D model; (c) Cross-sectional shape of (b)

Fig. 7 Effect of modification on contact angle and its modification principle (a) Contact angle of R-0; (b) Contact angle of R-1; (c) Hydrolysis of FAS; (d) Dehydration condensation

Fig. 8 Statistics and photographs of contact angle for samples (a) Contact angles of three groups with processing intervals; (b) Contact angle photographs of three groups

Fig. 9 Improvement of contact angle model and its force analysis of infiltrated water in the groove

Fig. 10 Morphological parameters of micro-texture (a) Micro grooves; (b) Micro-texture area; (c) Solid-liquid contact area of infiltrated water

Fig. 11 Theoretical contact angle variation and fitted curves (a) Theoretical variation of contact angle; (b) Fitted curve of variation of contact angle of group B; (c) Fitted curve of variation of contact angle of group C

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