Abstract: Nano-structured TiN films were synthesized on stainless steel by using plasma immersion ion implantation and deposition (PIII-D),
developed in this decade and considered as a advanced surface modification method. Samples deposited with TiN film were undertaken a tension test and
observed in situ by scanning electron microscope. It shows that there is no delamination, peeling or cracking existing on the film after relative
highly plastic deformation. Scratch test was chosen to measure the adhesion strength between the film and matrix, and a very high value was
obtained. Nano-indentation tests for the synthesized TiN film shows that it possesses very high nano-hardness and young’s modulus. Transmission
electron microscopy was used to identify the structure of the prepared film, atom force microscopy to observe the surface morphology, and Auger electron
spectroscope to detect the composition profile in depth. It is considered that the excellent mechanical properties of the synthesized TiN film are
attributed to the nanocrystal structure of the film, high density, excellent surface quality as well as a broader film/matrix interface achieved by PIII-D
process.

Key words: nano-structured film, titanium nitride, mechanical property, plasma immersion ion implantation and deposition