三级化学气相沉积法制备SiC纤维的微观组织结构

doi:10.3724/SP.J.1077.2010.01281

无机材料学报 ›› 2010, Vol. 25 ›› Issue (12): 1281-1285.DOI: 10.3724/SP.J.1077.2010.01281 CSTR: 32189.14.SP.J.1077.2010.01281

三级化学气相沉积法制备SiC纤维的微观组织结构

张荣军, 杨延清, 王晨, 沈文涛, 罗贤

(西北工业大学凝固技术国家重点实验室, 西安 710072)

收稿日期:2010-03-14 修回日期:2010-04-22 出版日期:2010-12-20 网络出版日期:2010-11-24
基金资助:
国家自然科学基金(50871086); 凝固技术国家重点实验室自主研究课题(KP200906)

Microstructure of SiC Fiber Fabricated by Three-stage Chemical Vapor Deposition

ZHANG Rong-Jun, YANG Yan-Qing, WANG Chen, SHEN Wen-Tao, LUO Xian

(State Key Lab of Solidification Processing, Northwestern Polytechnical University, Xi’an 710072, China)

Received:2010-03-14 Revised:2010-04-22 Published:2010-12-20 Online:2010-11-24
Supported by:
National Nature Science Foundation of China (50871086); Research Project of State Key Laboratory of Solidification Processing (KP200906)

摘要/Abstract

摘要： 以甲基三氯硅烷和乙炔为源气体, 用直流电热三级化学气相沉积法制备了带有碳涂层的钨芯SiC纤维, 利用扫描电子显微镜、激光拉曼光谱仪和透射电子显微镜等方法观察了纤维的微观组织结构. 结果表明, 所制备的SiC纤维由钨芯、W/SiC界面反应层、两层SiC和表面碳涂层组成. 纤维中的SiC主要为beta-SiC, 而且有明显的<111>择优取向, 沉积过程中出现的Si共沉积等缺陷, 导致其晶格紊乱. 拉曼光谱分析表明, 乙炔裂解得到的表面碳涂层由无定型碳和石墨组成.

关键词: SiC纤维, 化学气相沉积, 微观组织结构, 缺陷, 拉曼光谱

Abstract: Continuous silicon carbide (SiC) fiber with carbon coating was fabricated by three-stage chemical vapor deposition (CVD) on tungsten filament heated by direct current (DC), using CH₃SiCl₃ +H₂ as gaseous reactant for SiC sheath and C₂H₂ for the outmost carbon coating, respectively. Microstructure of the SiC fiber was examined by X-ray diffraction (XRD), scanning electron microscope (SEM), Raman spectroscope and transmission electron microscope (TEM). The results show that the SiC fiber consists of tungsten core, a W/SiC interfacial reaction zone, two layers of SiC with total thickness of 41μm and an outermost carbon coating of about 2 μm in thick. The deposited SiC is mainly composed of beta-SiC, and exhibits strong <111> fiber texture with abundant growth defects, such as co-deposit of free silicon and stacking faults, leading to the lattice imperfection of the SiC sheath. Raman spectrum indicates that the outmost carbon coating decomposed from C₂H₂ involves a mixture of amorphous carbon and graphite crystallite.

Key words: SiC fiber, chemical vapor deposition, microstructure, defects, Raman spectra

中图分类号:

TQ343

张荣军, 杨延清, 王晨, 沈文涛, 罗贤. 三级化学气相沉积法制备SiC纤维的微观组织结构[J]. 无机材料学报, 2010, 25(12): 1281-1285.

ZHANG Rong-Jun, YANG Yan-Qing, WANG Chen, SHEN Wen-Tao, LUO Xian. Microstructure of SiC Fiber Fabricated by Three-stage Chemical Vapor Deposition[J]. Journal of Inorganic Materials, 2010, 25(12): 1281-1285.

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三级化学气相沉积法制备SiC纤维的微观组织结构

Microstructure of SiC Fiber Fabricated by Three-stage Chemical Vapor Deposition

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