V含量对TaVN复合膜微结构、力学性能和摩擦性能的影响

doi:10.3724/SP.J.1077.2013.12498

无机材料学报 ›› 2013, Vol. 28 ›› Issue (7): 769-774.DOI: 10.3724/SP.J.1077.2013.12498 CSTR: 32189.14.SP.J.1077.2013.12498

V含量对TaVN复合膜微结构、力学性能和摩擦性能的影响

许俊华, 薛雅平, 曹峻, 喻利花

(江苏科技大学江苏省先进焊接技术重点实验室, 镇江 212003)

收稿日期:2012-08-15 修回日期:2012-10-15 出版日期:2013-07-20 网络出版日期:2013-06-19
基金资助:
国家自然科学基金(51074080); 江苏省自然科学基金 (BK2008240)

Influence of V Content on Microstructure, Mechanical and Friction Properties of TaVN Composite Films

XU Jun-Hua, XUE Ya-Ping, CAO Jun, YU Li-Hua

(Jiangsu Key Laboratory of Advanced Welding Technology, Jiangsu University of Science and Technology, Zhenjiang 212003, China)

Received:2012-08-15 Revised:2012-10-15 Published:2013-07-20 Online:2013-06-19
Supported by:
National Natural Science Foundation of China(51074080); Natural Science Foundation of Jiangsu Province(BK2008240)

摘要/Abstract

摘要： 采用磁控溅射仪制备了一系列不同V含量的TaVN复合膜, 利用X射线衍射仪研究复合膜以及磨痕的相组成, 利用纳米压痕仪表征复合膜的硬度, 采用高温摩擦磨损实验机研究了复合膜的室温和高温摩擦性能。结果表明: TaVN复合膜的微结构为面心立方结构, 随着V含量的增加, 衍射峰择优取向由(200)转变为(111); TaVN薄膜的显微硬度随着V含量增加, 先增加后降低, 在V含量为18.25at%时, 显微硬度达到最大值, 为32.3 GPa; 在常温下, TaVN复合膜的摩擦系数随着V含量的增加而降低; 当温度从室温升高到800℃, 薄膜的摩擦系数先升高后降低。采用晶体化学理论讨论了TaVN复合膜和TaN单层膜在高温下的摩擦机理。

关键词: TaVN复合膜, 磁控溅射, 力学性能, 摩擦性能

Abstract: A series of TaVN composite films with different V contents were fabricated by magnetron sputtering technique. The microstructures, mechanical properties, friction properties at different temperatures were investigated by X-ray diffraction, nano-indentation, CSM high-temperature ball-on-disc tribo-meter, respectively. The results show that the microstructure of TaVN films has fcc structure. With V content increasing, the preferential orientation changes from (111) to (200), and the hardness increases to a peak value (32.3 GPa) and then decreases. At room temperature, the friction coefficient of TaVN films decreases as V content increases, which may be related to the formation of V₂O₅. When the temperatures increase from room temperature to 800℃, the friction coefficient increases and then decreases. The friction mechanisms of TaVN composite films and TaN film at high temperature are compared based on the crystal chemistry theory.

Key words: TaVN composited films, magnetron sputtering technique, mechanical properties, friction properties

中图分类号:

TG174

许俊华, 薛雅平, 曹峻, 喻利花. V含量对TaVN复合膜微结构、力学性能和摩擦性能的影响[J]. 无机材料学报, 2013, 28(7): 769-774.

XU Jun-Hua, XUE Ya-Ping, CAO Jun, YU Li-Hua. Influence of V Content on Microstructure, Mechanical and Friction Properties of TaVN Composite Films[J]. Journal of Inorganic Materials, 2013, 28(7): 769-774.

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V含量对TaVN复合膜微结构、力学性能和摩擦性能的影响

Influence of V Content on Microstructure, Mechanical and Friction Properties of TaVN Composite Films

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