不同退火过程对FeZrBCu软磁合金薄膜巨磁阻抗效应的影响

doi:10.3724/SP.J.1077.2010.00721

无机材料学报 ›› 2010, Vol. 25 ›› Issue (7): 721-724.DOI: 10.3724/SP.J.1077.2010.00721 CSTR: 32189.14.SP.J.1077.2010.00721

不同退火过程对FeZrBCu软磁合金薄膜巨磁阻抗效应的影响

王文静¹, 袁慧敏¹, 萧淑琴²

(1. 山东省教育学院物理系, 济南250013; 2. 山东大学物理学院, 济南250100)

收稿日期:2009-11-11 修回日期:2010-01-26 出版日期:2010-07-20 网络出版日期:2010-06-10
基金资助:
国家自然科学基金(10804062); 山东省教育厅科技计划项目(J08LI62)

Influence of Different Annealing Process on the Giant Mageto-impedance Effect of FeZrBCu Films

WANG Wen-Jing¹, YUAN Hui-Min¹, XIAO Shu-Qin²

(1. Department of Physics, Shandong Institute of Education, Jinan 250013, China; 2. School of Physics, Shandong University, Jinan 250100, China)

Received:2009-11-11 Revised:2010-01-26 Published:2010-07-20 Online:2010-06-10

摘要/Abstract

摘要：

用射频溅射法制备了(Fe₈₈Zr₇B₅)_0.96Cu_0.04非晶软磁合金薄膜. 研究了不同退火条件对其巨磁阻抗(GMI)效应的影响. 该样品在自然退火和电流退火热处理后, 纵向GMI比下降, 并随退火电流的增加而增加, 在电流为800mA时达到最大值17%, 磁场灵敏度相对于未退火样品的4%(kA/m)^-1有所提高, 达到7%(kA/m)^-1. (Fe₈₈Zr₇B₅)_0.96Cu_0.04薄膜经不同温度下纵向磁场退火处理后, 样品的纵向和横向GMI比均有所提高, 在250℃获得最大的GMI比, 13MHz时, 最大纵向磁阻抗比达到17.5%, 表现为单峰; 横向磁阻抗比曲线变为双峰结构, 在±0.4kA/m的磁场下, 出现峰值为17.8%.

关键词: 铁基合金, 薄膜, 巨磁阻抗效应, 感应各向异性

Abstract:

Influence of different annealing process on the giant magneto-impedance (GMI) effect in soft magnetic alloy films of (Fe₈₈Zr₇B₅)_0.96Cu_0.04, which were prepared by radio frequency (RF) sputtering, was studied. It is obtained that both natural and current annealing can reduce the longitudinal GMI ratio. And the longitudinal GMI ratio of the annealed films increases with the increase of annealing current, and reaches a maximum value of 17% at 800mA, while the sensitivity increase to 7%(kA/m)^-1 at such annealing current (800mA). In addition, influence of the magnetic field annealing on GMI effect is discussed. It is found that both the longitudinal and transverse GMI ratios of the films after magnetic field annealed increase at different temperatures. There exists a critical temperature (250℃), at which the longitudinal GMI ration presents a single-peak with a value of 17.5%, while the transverse one presents a double-peak with a value of 17.8% at ±0.4kA/m.

Key words: Fe-based alloy, films, giant magneto-impedance effect, induced anisotropy

中图分类号:

O484

王文静, 袁慧敏, 萧淑琴. 不同退火过程对FeZrBCu软磁合金薄膜巨磁阻抗效应的影响[J]. 无机材料学报, 2010, 25(7): 721-724.

WANG Wen-Jing, YUAN Hui-Min, XIAO Shu-Qin. Influence of Different Annealing Process on the Giant Mageto-impedance Effect of FeZrBCu Films[J]. Journal of Inorganic Materials, 2010, 25(7): 721-724.

参考文献

[1]Mandal K, Mandal S P, Vázquez M, et al. Giant magnetoimpedance effect in a positive magnetostrictive glass-coated amorphous microwire. Phys. Rev. B, 2002, 65(6): 64402-64407.
[2]Xiao S Q, Liu Y H, Yan S S, et al. Giant magnetoimpedance and domain structure in FeCuNbSiB films and sandwiched films. Phys. Rev. B, 2000, 61(8): 5734-5739.
[3]Muraca D, Cremaschi V, Knobel M, et al. Influence of Ge on magnetic and structural properties of Joule-heated Co-based ribbons: Giant magnetoimpedance response. J. Magn. Magn. Mater., 2008, 320(15): 2068-2073.
[4]Sinha S, Das B, Mandal K. Magnetoimpedance of a glass-coated amorphous microwire. J. Appl. Phys., 2009, 105(7): 07A311-1-3.
[5]Le Anh-Tuan, Phan Manh-Huong, Kim Chong-Oh, et al. Influences of annealing and wire geometry on the giant magnetoimpedance effect in a glass-coated microwire LC-resonator. J. Phys. D: Appl. Phys., 2007, 40(15): 4582-4585.
[6]Pompéia F, Gusm-o L A P, Barbosa C R Hall, et al. Ring shaped magnetic field transducer based on the GMI effect. Meas. Sci. Technol., 2008, 19(2): 025801-025810.
[7]Yoshizawa Y, Oguma S, Yamauchi K. New Fe-based soft magnetic alloys composed of ultrafine grain structure. J. Appl. Phys., 1988, 64(10): 6044-6046.
[8]Makino Akihiro, Hatanai Takashi, Naitoh Yutaka, et al. Applications of nanocrystalline soft magnetic Fe-M-B (M=Zr, Nb) alloys “NANOPERM(R)”. IEEE Trans. Magn., 1997, 33(5): 3793-3798.
[9]Suzuki Kiyonori, Makino Akihiro, Inoue Akihisa, et al. Low core losses of nanocrystalline Fe–M–B (M=Zr, Hf, or Nb) alloys. J. Appl. Phys, 1993, 74(5): 3316-3322.
[10]Lee Heebok , Kim Yong-Kook , Kim Taik-Kee, et al. Magnetoimpedance effect in nanocrystalline Fe_90-xB_xZr₇Cu₁Al₂ (x= 2,4,6,8) alloys. J. Appl. Phys., 1999, 85(8): 5429-5431.
[11]Aragoneses P, Holzer D, Sassik H, et al. Frequency dependence of GMI effect in nanocrystalline Fe₈₆Zr₇B₆Cu ribbons. J. Magn. Magn. Mater., 1999, 203(1/2/3): 292-294.
[12]黎伦, 张瑞, 孔祥薇, 等. Fe₈₈Zr₇B₄Co软磁纳米晶薄带的巨磁阻抗效应. 金属功能材料, 2009, 16(4): 4-7.
[13]张瑗, 朱逢吾, 宝野和博, 等(ZHANG Yuan, et al). Cu在非晶合金Fe-Zr-B结晶过程中的作用. 中国科学 E辑 (Sci. China Ser. E), 1998, 28(06): 485-490.
[14]何峻, 郭慧群, 程利智, 等(HE Jun, et al). 电流退火对铁基薄带巨磁阻抗效应的影响. 物理学报(Acta Physica Sinica), 1999, 48(13): 159-163.

[1]	董晨雨, 郑维杰, 马一帆, 郑春艳, 温峥. 压电力显微镜表征Pb(Mg,Nb)O₃-PbTiO₃超薄膜弛豫特性[J]. 无机材料学报, 2025, 40(6): 675-682.
[2]	陶桂龙, 支国伟, 罗添友, 欧阳佩东, 衣新燕, 李国强. 空腔型薄膜体声波滤波器的关键技术进展[J]. 无机材料学报, 2025, 40(2): 128-144.
[3]	赵志翰, 郭鹏, 魏菁, 崔丽, 刘山泽, 张文龙, 陈仁德, 汪爱英. Ti-DLC薄膜压阻性能及载流子输运行为研究[J]. 无机材料学报, 2024, 39(8): 879-886.
[4]	张慧, 许志鹏, 朱从潭, 郭学益, 杨英. 大面积有机-无机杂化钙钛矿薄膜及其光伏应用研究进展[J]. 无机材料学报, 2024, 39(5): 457-466.
[5]	鲍可, 李西军. 化学气相沉积法制备智能窗用热致变色VO₂薄膜的研究进展[J]. 无机材料学报, 2024, 39(3): 233-258.
[6]	杨志亮, 杨鏊, 刘鹏, 陈良贤, 安康, 魏俊俊, 刘金龙, 吴立枢, 李成明. 热管理用3英寸硅衬底金刚石薄膜的制备[J]. 无机材料学报, 2024, 39(3): 283-290.
[7]	刘松, 张发强, 罗进, 刘志甫. 0.9BaTiO₃-0.1Bi(Mg_1/2Ti_1/2)O₃铁电薄膜制备及储能特性[J]. 无机材料学报, 2024, 39(3): 291-298.
[8]	徐向明, Husam N ALSHAREEF. MXetronics—MXene电子学[J]. 无机材料学报, 2024, 39(2): 171-178.
[9]	张波涛, 孙婷婷, 王连军, 江莞. 喷墨打印制备AgCuTe热电薄膜[J]. 无机材料学报, 2024, 39(12): 1325-1330.
[10]	刘锁兰, 栾福园, 吴子华, 寿春晖, 谢华清, 杨松旺. 原位生长钙钛矿太阳能电池共形氧化锡薄膜[J]. 无机材料学报, 2024, 39(12): 1397-1403.
[11]	任冠源, 李宜冠, 丁冬海, 梁瑞虹, 周志勇. CaBi₂Nb₂O₉铁电薄膜的生长取向调控和性能研究[J]. 无机材料学报, 2024, 39(11): 1228-1234.
[12]	张哲, 孙婷婷, 王连军, 江莞. 不同维度Ag₂Se构筑柔性热电薄膜的性能优化与器件集成研究[J]. 无机材料学报, 2024, 39(11): 1221-1227.
[13]	戴乐, 刘洋, 高轩, 王书豪, 宋雅婷, 唐明猛, 刘丽莎, 汪尧进. 浓度梯度掺杂实现BiFeO₃薄膜自极化[J]. 无机材料学报, 2024, 39(1): 99-106.
[14]	胡盈, 李自清, 方晓生. 溶液法制备AgBi₂I₇薄膜及其光电探测性能研究[J]. 无机材料学报, 2023, 38(9): 1055-1061.
[15]	陈明月, 颜志超, 陈静, 李敏娟, 刘志勇, 蔡传兵. YBa₂Cu₃O_7-_δ薄膜的BaCl₂/BaF₂-MOD法制备及超导特性研究[J]. 无机材料学报, 2023, 38(2): 199-204.

不同退火过程对FeZrBCu软磁合金薄膜巨磁阻抗效应的影响

Influence of Different Annealing Process on the Giant Mageto-impedance Effect of FeZrBCu Films

PDF (PC)

可视化

被引次数

摘要/Abstract

引用本文

使用本文

参考文献

相关文章 15

编辑推荐

Metrics

本文评价