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无机材料学报

无机材料学报

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有机凝胶法制备Sr0.5Ba0.5Nb2O6铁电薄膜及其电性能研究

赵九蓬, 强亮生, 张蕾   

  1. 哈尔滨工业大学应用化学系, 哈尔滨 150001
  • 收稿日期:2003-12-10 修回日期:2004-02-23 出版日期:2005-01-20 网络出版日期:2005-01-20

Preparation of SBN Thin Films by the Organic Gel Method and the Electrical Properties

ZHAO Jiu-Peng, QIANG Liang-Sheng, ZHANG Lei   

  1. Department of Applied Chemistry, Harbin Institute of Technology, Harbin 150001, China
  • Received:2003-12-10 Revised:2004-02-23 Published:2005-01-20 Online:2005-01-20

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摘要： 采用有机凝胶法制备了Sr0.5Ba0.5Nb2O6(SBN50)铁电薄膜. 研究了pH值和EDTA的用量对Sr-Ba-Nb前驱体溶液稳定性的影响，并对不同pH值条件下获得的Sr-Ba-Nb干凝胶的
热分解历程进行了对比. 计算和实验结果表明, 制备Sr-Ba-Nb前驱体溶液的最佳pH=8, EDTA: 金属离子(摩尔比)=2:1. 在700℃下退火30min所得SBN50薄膜为单一钨青铜结构多晶薄
膜. 室温下, 测试频率1kHz时, 薄膜的介电常数为221, 介电损耗为0.02, 剩余极化强度Pr=8.17μ/cm2, 矫顽场Ec=16.9kV/cm.

关键词: 铌酸锶钡薄膜, 有机凝胶法, 电性能

Abstract: Sr0.5Ba0.5Nb2O6 (SBN50) thin films were prepared by the organic gel method. The microstructural variation of the gel powders and SBN thin films with annealing temperature was
studied by differential thermal analysis (DTA), thermogravimetry (TG), Fourier transform infrared (FT-IR) and X-ray diffraction (XRD). The differences in the decomposition between Sr-Ba-Nb nitrate precursor
solutions with different pH values were investigated. By annealing at 700℃ for 2h, polycrystalline SBN thin films with smooth and crack-free surface were derived from the precursor solution with
pH=8. Electric properties measurement indicated that the SBN films demonstrated a ferroelectric hysteresis loop. The remanent polarization(Pr) and coercive field (Ec) were 8.17μC/cm2
and 16.9kV/cm, respectively.

Key words: Sr0.5Ba0.5Nb2O6 thin films, organic gel method, electrical properties

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