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热处理条件对sol-gel法Pb0.4Sr0.6TiO3薄膜形成影响的研究

刘远良, 杜丕一, 翁文剑, 韩高荣, 沈鸽   

  1. 浙江大学硅材料国家重点实验室, 杭州 310027
  • 收稿日期:2003-11-28 修回日期:2004-01-30 出版日期:2005-01-20 网络出版日期:2005-01-20

Effects of Heat Treatment on the Formation of Sol-Gel Derived Pb0.4Sr0.6TiO3 Thin

LIU Yuan-Liang, DU Pi-Yi, WENG Wen-Jian, HAN Gao-Rong, SHEN Ge   

  1. The state key laboratory of silicon materials, Zhejiang University, Hangzhou 310027, China
  • Received:2003-11-28 Revised:2004-01-30 Published:2005-01-20 Online:2005-01-20

摘要: 采用sol-gel法, 利用快速热处理工艺过程, 保持烧结温度在最低温度(约500℃)以上, 制备了多晶钙钛矿结构的PST(Pb0.4Sr0.6TiO3)薄膜. 通过XRD、SEM、AFM等方法对晶相的形成与热处理条件之间的关系进行了测试. 研 究表明, 利用溶胶-凝胶法制备PST薄膜的钙钛矿晶相形成过程及晶相含量受制备过程及晶相形成时离子的活性所控制. 通过快速热处理方法, 在凝胶分解过程中得到的高活性离子直接形成晶相, 可以得到相应更多的晶体含量及在较低的温度下形成晶相. 在600℃下RTP制备的PST薄膜的晶相含量比同温度下保温热处理薄膜增加约14%, 利用RTP制备PST薄膜的晶相形成温度约在500℃, 相应要降低约50℃. 薄膜的表面形貌受制备热处理过程影响, 快速热处理薄膜的表面保持形成时的形貌: 非晶相薄膜以光洁表面出现, 晶态膜以均匀分布山峰状的形貌出现. 受气氛的浸蚀作用, 长时间热处理后的薄膜表面出现了变化, 在原形貌的基础上以细小颗粒状覆盖的表面出现.

关键词: sol-gel, 热处理, PST薄膜, 晶相形成

Abstract: The Pb0.4Sr0.6TiO3 (PST) thin films with the perovskite phase were fabricated successfully on ITO/glass substrates by the sol-gel method
with rapid thermal processing (RTP) above 500℃. The crystalline phase structures and the surface morphologies of the thin films were measured through XRD, SEM and AFM respectively. Results show that both the formation of the perovskite and
contents of the crystalline phase in this PST thin film are dependent on the preparing process and the activity of ions in the formation of the crystalline
phase. By RTP, high active ions obtained in the gel decomposition directly form the crystalline phase, and consequently, much more contents of the crystalline
phase can be obtained even at a relatively lower temperature. 14% more contents of crystalline phase appear in PST thin film at 600℃ by RTP than
by heat treatment at 600℃ for a long time. The lowest temperature of forming of the proveskite phase in sol-gel derived PST thin
film is approximately 500℃ by RTP, which is 50℃ lower than that by heat treatment for a long time. The surface morphology
of the thin film is related to the heat treatment processing. By RTP the surface morphology of the thin film keeps the original state, where the
actual smooth exhibits the noncrystalline thin film and the hill-like protuberance shows the well crystalline one. Due to etching under the
oxygen atmosphere at high temperature, the thin film calcined for a long time contributes the morphology with uniformly dispersed micro conical
cylinders all over the surface on the basis of the original smooth or hill-like surface state.

Key words: sol-gel, heat treatment, PST thin films, crystalline formation

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