高级检索
无机材料学报

无机材料学报

• 研究论文 • 上一篇    下一篇

用化学溶液沉积方法制备Pr0.7Ca0.3MnO3薄膜

王群; 董睿; 陈立东   

  1. 中国科学院上海硅酸盐研究所高性能陶瓷与超微结构国家重点实验室 上海 200050
  • 收稿日期:2003-08-07 修回日期:2004-02-03 出版日期:2004-09-20 网络出版日期:2004-09-20

Preparation of Pr0.7Ca0.3MnO3 Nanocrystalline Films by Chemical Solution Deposition Route

WANG Qun; DONG Rui; CHEN Li-Dong   

  1. State Key Laboratory of High Performance Ceramics and Superfine Microstructure; Shanghai Institute of Ceramics; Chinese Academy of Sciences; Shanghai 200050; China
  • Received:2003-08-07 Revised:2004-02-03 Published:2004-09-20 Online:2004-09-20

PDF (PC)

985

摘要： 混合价态的锰氧化物Pr1-xCaxMnO3薄膜是近年来国际上超导体以及巨磁电阻领域的研究热点之一.本文采用化学溶液沉积方法在Pt/Ti/SiO2/Si基底上制备出Pr1-xCaxMnO3薄膜,降低了材料成本;前驱体中不使用鳌和剂,简化了工艺.采用XRD、FT-IR、SEM、AFM、EPMA以及俄歇探针仪等方法对所制备的薄膜进行了表征.结果表明,实验中以较低的温度实现了PCMO钙钛矿结构的晶化;薄膜平整光滑致密,各组分分布均匀,C杂质含量处于很低的水平.

关键词: 混合价锰氧化物, 薄膜, 化学溶液沉积法

Abstract: Mixed-valent manganites Pr1-xCaxMnO3 are the object of continuously growing interest in the field of superconductors and colossal magnetoresistance (CMR) materials. In this work, Pr1-xCaxMnO3
films were successfully prepared by a novel and simple chemical solution deposition method using Pt/Ti/SiO2/Si as the substrate. X-ray diffraction, FT-IR, SEM, AFM, electron microprobe analysis and
Auger microprobe analysis were adopted for the characterization of the prepared material. It is proved that Pr1-xCaxMnO3 films obtained are of single-phase with perovskite structure. The constituent
elements are homogeneous, and Pr0.7Ca0.3MnO3 particles are densely and compactly distributed in the films.

Key words: mixed-valent manganites, film, chemical solution deposition method

中图分类号: