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无机材料学报

无机材料学报

• 研究论文 • 上一篇    下一篇

硫化物系陶瓷薄膜湿敏性能的研究

王天宝; 王列娥; 吴怀良; 冯宝康   

  1. 中国科学院上海硅酸盐研究所; 上海200050
  • 收稿日期:1995-12-22 修回日期:1996-02-14 出版日期:1997-02-20 网络出版日期:1997-02-20

Humidity Sensitive Properties of Sulfide Ceramic Film

WANG Tianbao; WANG Lie e; WU Huailiang   

  1. Shanghai Institutc of Ceramics; Chinese Academy of Sciences Shanghai 200050 China
  • Received:1995-12-22 Revised:1996-02-14 Published:1997-02-20 Online:1997-02-20

PDF (PC)

894

被引次数

4

摘要： 本工作根据要研制一种纯物理吸附表面的设想，研究了用溶胶法制备的Cu、Zn、Fe、Sb和Ti等的硫化物系薄膜的感湿特性，发现硫化物系薄膜具有感湿灵敏度高、滞后小、响应快等优点，其中离子的电荷-半径比大的金属硫化物湿敏元件具有特别好的长期稳定性;与预期的结果一致.

关键词: 硫化物, 薄膜, 湿敏元件

Abstract: Film Humidity sensors of Cu, Zn, Fe, Sb, Ti and so on sulfide systenis were prepared by the Sol-gel mcthod aceording to the idea of developing a kind of pure physisorbed surface (without chemisorption). It was found that the filmhumidity sensors of sulfide systems possess the properties of high sensitivity, small hysterisis, and rapid responsc, and the sensors made of sulfide films of metal cations with Large charge-radius ratio have all excellent durability, these agree with our cxpectant results.

Key words: sulfide, film humidity sensor, ceramic humidity sensor