Abstract: Si-based nano-powders were prepared from ((CH₃)₃Si)₂NH by CVD. The powders synthesizedat 1000-1500℃ were all amorphous. When the synthesizing temperature was 1000℃, the powders were near-spherical and had a particle-size of 8~10nm. When the synthesizing temperaturewas 1400℃, the powders were spherical and well-distributed, having a particle-size of 8~10nm.After crystallization at high temperatures, the powders synthesized at low temperatures becamewhisker mAlNly contAlNing SiC with small amount of Si₃N₄, while the powders synthesized at high temperatures became to 20～40nm particles mainly containing β-SiC with small amount of α-SiC and an amorphous surface-layer of 1～2nm. When exposed to air for three months, the crystallized particles became amorphous.

Key words: CVD, nano, amorphous, crystallization