Journal of Inorganic Materials

   

Research Progress on Low-temperature Sintering of PZT Ceramics

JIANG Kun1,5, LI Letian1,5, ZHENG Mupeng2, HU Yongming1, PAN Qinxue3, WU Chaofeng4, WANG Ke5   

  1. 1. Hubei Key Laboratory of Micro-Nanoelectronic Materials and Devices, School of Microelectronics, Hubei University, Wuhan 430062, China;
    2. College of Materials Science and Engineering, Beijing University of Technology, Beijing 100124, China;
    3. School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China;
    4. Tongxiang Tsingfeng Technology Co., Ltd., Jiaxing 314501, China;
    5. School of Materials Science and Engineering, Tsinghua University, Beijing 100084, China
  • Received:2024-12-10 Revised:2025-02-25
  • About author:JIANG Kun (2000-), male, Master candidate. E-maill: 202321119012904@stu.hubu.edu.cn
  • Supported by:
    National Natural Science Foundation of China (U24A20203, 52472117); National Key R&D Program of China (2020YFA0711700)

Abstract: Pb(Zr, Ti)O3 (PZT) ceramics play a crucial role in fields such as national defense, healthcare, communication, and energy conversion due to their excellent piezoelectric, ferroelectric, and pyroelectric properties. However, the sintering temperature of PZT ceramics usually exceeds 1200 ℃, resulting in high energy consumption, and a large amount of PbO volatilization. This volatilization disrupts the stoichiometric balance of PZT ceramics, thereby adversely affecting their electrical properties. Moreover, the rapid development of piezoelectric multilayer devices further requires PZT ceramics to be co-sintered with low-cost metal electrodes at low temperatures. To address these challenges, researchers have extensively investigated the low-temperature sintering of PZT piezoelectric ceramics, successfully reducing the sintering temperature of PZT ceramics to below 1000 ℃, which has attracted widespread attention. Starting from the structural characteristics and physical properties of PZT ceramics, this article reviews the current research status of low-temperature sintering technology in the field of PZT ceramics. It mainly introduces the current status of low-temperature sintering techniques, including spark plasma sintering, hot-pressing sintering, cold sintering, as well as the use of sintering aids such as forming solid solutions, liquid-phase sintering, and transient liquid-phase sintering. The influence of these sintering techniques on the microstructure and electrical properties of PZT piezoelectric ceramics is systematically summarized. The issue of electrical performance degradation caused by sintering aids and possible solutions are discussed. At last, future development trends of low-temperature sintering technologies for PZT ceramic are explored.

Key words: PZT, low-temperature sintering, piezoelectric ceramic, perovskite, review

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