无机材料学报

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TiO2氧敏元件的研究和发展概况

周伟; 孙成文; 杨芝洲   

  1. 中国科学院上海硅酸盐研究所; 上海 200050
  • 收稿日期:1997-05-16 修回日期:1997-06-04 出版日期:1998-06-20 网络出版日期:1998-06-20

Research and Development of Titania Oxygen Sensors

ZHOU Wei; SUN Cheng-Wen; YANG Zhi-Zhou   

  1. Shanghai Institute of Ceramics; Chinese Academy of Sciences Shanghai 200050 China
  • Received:1997-05-16 Revised:1997-06-04 Published:1998-06-20 Online:1998-06-20

摘要: TiO2材料作为氧传感器具有广泛的应用.本文介绍了TiO2氧传感器的工作原理和制作过程中采用的三种工艺,即陶瓷烧结体、厚膜和薄膜技术.并对如何提高氧传感器的性能进行了探讨.

关键词: 二氧化钛氧传感器, 陶瓷烧结体, 厚膜, 薄膜

Abstract: TiO2 oxygen sensors are widely used. The oxygen-sensing mechanism and ceramic, thick filmand thin film techniques used for manufacturing the sensors were presented. The wads of improvingthe properties of TiO2 oxygen sensors were also discussed.

Key words: titanium dioxide oxygen sensor, ceramic, thick film, thin film

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