Mn掺杂对ZnO薄膜结构和光学性质的影响

doi:10.3724/SP.J.1077.2007.00911

无机材料学报

Mn掺杂对ZnO薄膜结构和光学性质的影响

孙柏, 赵朝阳, 徐彭寿, 张国斌, 韦世强

(中国科学技术大学国家同步辐射实验室, 合肥 230029)

收稿日期:2006-10-18 修回日期:2006-11-24 出版日期:2007-09-20 网络出版日期:2007-09-20

Influence of Mn-doping on the Structure and Optical Properties of ZnO Thin Film

SUN Bai, ZHAO Chao-Yang, XU Peng-Shou, Zhang Guo-Bin, WEI Shi-Qiang

(National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, China)

Received:2006-10-18 Revised:2006-11-24 Published:2007-09-20 Online:2007-09-20

摘要/Abstract

摘要： 利用脉冲激光淀积的方法在Si衬底上生长出了$c$轴高度取向的ZnO和Zn_0.9Mn_0.1O薄膜. 光致发光结果显示了Mn的掺杂引起了薄膜的带边发射蓝移, 强度减弱, 紫光发射几乎消失, 但绿光发射增强. 利用X射线衍射, X射线吸收精细结构和X射线光电子能谱等实验技术对Mn掺杂的ZnO薄膜的结构及其对光学性质影响进行了研究. 结果表明: Mn掺入到ZnO薄膜中形成了Zn_0.9Mn_0.1O合金薄膜, Mn以+2价的价态存在, 这就导致了掺Mn以后的薄膜带隙变大, 在发光谱中表现为带边发射的蓝移. 同时由于掺入的Mn与薄膜中的填隙Zn反应, 导致薄膜的结晶性变差,薄膜中的填隙Zn减少, O空位增多, 引起带边发射和紫光发射减弱, 绿光发射增强.

关键词: ZnO, 脉冲激光淀积, XAFS, XPS, 光致发光

Abstract: Highly c-axis oriented ZnO and Zn_0.9Mn_0.1O thin films were fabricated on Si substrates by pulsed laser deposition. Photoluminescence results show that Mn atoms doping induces the blue-shift of UV emission. At the same time, the intensity of UV emission decreases, while green emission increases. X-ray diffraction, X-ray absorption fine structure and X-ray photoelectron spectroscopy were employed to characterize the influence of Mn-doping on properties of ZnO thin films. The results indicate that Zn_0.9Mn_0.1O alloy forms after Mn doping in ZnO. Mn atoms enter into the ZnO crystal lattice and substitute Zn atoms with Mn²⁺ state. As a result, the band gap of Zn_0.9Mn_0.1O increases, which is associated with the UV emission blue-shift. Furthermore, the reaction between the doped Mn and interstitial Zinc atoms(Zn_i) prompts the decay of samples' crystallinity. Thus, interstitial Zinc atoms(Zn_i) decrease and the oxygen vacancy (V_O) increases, showing the intensity weakening of the UV and violet emission, and the increasing of green emission of the film samples.

Key words: inc oxide, pulsed laser deposition, X-ray absorption fine structure, X-ray photoelectron spectroscopy, photoluminescence

中图分类号:

O484

孙柏,赵朝阳,徐彭寿,张国斌,韦世强. Mn掺杂对ZnO薄膜结构和光学性质的影响 [J]. 无机材料学报, DOI: 10.3724/SP.J.1077.2007.00911.

SUN Bai,ZHAO Chao-Yang,XU Peng-Shou,Zhang Guo-Bin,WEI Shi-Qiang. Influence of Mn-doping on the Structure and Optical Properties of ZnO Thin Film
[J]. Journal of Inorganic Materials, DOI: 10.3724/SP.J.1077.2007.00911.

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Mn掺杂对ZnO薄膜结构和光学性质的影响

Influence of Mn-doping on the Structure and Optical Properties of ZnO Thin Film

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