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无机材料学报

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六甲基二硅胺烷(HMDS)为原料CVD制备硅基纳米粉体的研究

江东亮; 陆忠乾; 黄政仁; 严东生   

  1. 中国科学院上海硅酸盐研究所; 上海200050
  • 收稿日期:1996-05-23 修回日期:1996-08-09 出版日期:1997-06-20 网络出版日期:1997-06-20

Preparation of Si-based Nano-powders from ((CH3)3Si)2NH by CVD

JIANG Dongliang; LU Zhongqian; HUANG Zhengren; YAN Dongsheng   

  1. Shanghai Institute of Ceramics; Chinese Academy of Sciences Shanghai 200050 China
  • Received:1996-05-23 Revised:1996-08-09 Published:1997-06-20 Online:1997-06-20

PDF (PC)

1113

被引次数

10

摘要： 以六甲基二硅胺烷作原料，用CVD法合成的纳米粉体，在1000～1500℃温度范围内合成的均属无定形，1000℃合成的纳米颗粒呈圆球形，粒径8～10nm，少量25～30nm．在1400℃高温下合成的颗粒较均匀，为8～10nm的圆球形．经高温晶化处理后，低温时合成的粉末呈晶须状，SiC和Si3N4相共存，以SiC相为主．较高温度下合成的粉体颗粒长大成20～40nm，以β-SiC相为主伴有α-SiC相，颗粒外表面有1～2nm的非晶层包裹，当在大气中存放三个月以后，则观测到原来品化的结构变成了无定形．

关键词: CVD, 纳米, 无定形, 晶化

Abstract: Si-based nano-powders were prepared from ((CH3)3Si)2NH by CVD. The powders synthesizedat 1000-1500℃ were all amorphous. When the synthesizing temperature was 1000℃, the powders were near-spherical and had a particle-size of 8~10nm. When the synthesizing temperaturewas 1400℃, the powders were spherical and well-distributed, having a particle-size of 8~10nm.After crystallization at high temperatures, the powders synthesized at low temperatures becamewhisker mAlNly contAlNing SiC with small amount of Si3N4, while the powders synthesized at high temperatures became to 20～40nm particles mainly containing β-SiC with small amount of α-SiC and an amorphous surface-layer of 1～2nm. When exposed to air for three months, the crystallized particles became amorphous.

Key words: CVD, nano, amorphous, crystallization