Reactive Sputter Deposition of nc-TiN/a-Si3N4 Nanocomposite Films in a Magnetized Inductively Coupled Plasma

Abstract

Abstract: A novel magnetized plasma CVD and PVD combined technique was developed aiming at synthesizing nanocomposite
films. The nanocrystalline nc-TiN/amorphous a-Si₃N₄ nanocomposite film was satisfactorily fabricated onto silicon wafer
substrates by reactively sputtering a TiSi alloyed target in a magnetized inductively coupled radio-frequency argon/nitrogen plasma.
Scanning electron microscopy (SEM), X-ray diffractometry (XRD), X-ray photoelectron spectroscopy (XPS) and high-resolution transmission electron
microscopy (HRTEM) were utilized to characterize the film structurally and compositionally. XRD, XPS and HRTEM investigations evidently revealed that
the film was nanocomposite consisting basically of ～3nm TiN nanocrystallites in an amorphous Si₃N₄ matrix.

Key words: nanocomposite films, magnetized plasma, titanium nitride, silicon nitride

CLC Number:

O484

FAN Qiu-Lin,ZHAO Hong-Yu,SONG Li-Xin,ZHANG Tao,HU Xing-Fang. Reactive Sputter Deposition of nc-TiN/a-Si₃N₄ Nanocomposite Films in a Magnetized Inductively Coupled Plasma[J]. Journal of Inorganic Materials.

References

[1] Veprek S, Reiprich S. Thin Solid Films, 1995, 268: 64--71.
[2] Veprek S, Nesladek P, Niederhofer A, et al. Surf. Coat. Technol., 1998, (108-109): 138--147.
[3] Veprek S. Thin Solid Films, 1998, 317: 449--454.
[4] Vaz F, Rebouta F, Almeida B, et al. Surf. Coat. Technol., 1999, (120-121): 166--172.
[5] Veprek S. J. Vac. Sci. Technol. A, 1999, 17: 2401--2420.
[6] Hermann A. Jehn, Surf. Coat. Technol., 2002, 131: 433--440.
[7] Rebouta L, Tavares C J, Aimo R, et al. Surf. Coat. Technol., 2000, 133-134: 234--239.
[8] Veprek S, Haussmann M, Reiprich S. J. Vac. Sci. Technol. A, 1996, 14: 46--51.
[9] Veprek S, Reiprich S, Li S Z. Appl. Phys. Lett., 1995, 66: 2640--2642.
[10] Christiansen S, Albrecht M, Strunk H P. J. Vac. Sci. Technol. B, 1998, 16: 19--22.
[11] Diserens M, Patscheider J, Levy F. Surf. Coat. Technol., 1999, (120-121): 158--165.
[12] Sun X, Reid J S, Kolawa E, et al. J. Appl. Phys., 1997, 81: 656--663.
[13] Vaz F, Rebouta L, Ramos S, et al. Surf. Coat. Technol., 1998, (100-101): 110--115.
[14] Vaz F, Rebouta L, Ramos S, et al. Surf. Coat. Technol., 1998, (108-109): 236--240.
[15] Musil J, Zeman P, Hruby H, et al. Surf. Coat. Technol., 1999, (120-121): 179--183.
[16] Holubar P, Jilek M, Sima M. Surf. Coat. Technol., 1999, (120-121): 184--188.
[17] Holubar P, Jilek M, Sima M. Surf. Coat. Technol., 2000, (133-134): 145--151.
[18] Kwang Ho Kim, Sung-ryong Choi, Soon-young Yoon. Surf. Coat. Technol., 2002, 298: 243--248.
[19] Li D, Lopez S, Chung Y W, et al. J. Vac. Sci. Technol. A, 1995, 13: 1063--1066.
[20] You K I, Yoon N S, Hwang S M. Surf. Coat. Technol., 1999, 114: 60--64.
[21] Colpo P, Meziani T, Gibson N, Ceccone G, et al. Surf. Coat. Technol., 1999, (116-119): 863--867.
[22] Meng M J, Curtis T J, Rehn L E, et al. Surf. Coat. Technol., 1999, (120-121): 206--212.
[23] Sung C Y, Yoko Maemura, Kazuhiko Tazoe, et al. Surf. Coat. Technol., 1997, 97: 366--371.
[24] Kelly P J, Arnell R D. Surf. Coat. Technol., 1998, (108-109): 317--322.
[25] Zhang J Q, Setsuhara Y, Ariyasu T, et al. J. Vac. Sci. Technol. A, 1996, 14: 2163--2168.
[26] Hwang S W, Lee Y J, Han H R, et al. J. Vac. Sci. Technol. A, 1999, 17: 1211--1216.
[27] Lee Y J, Han H R, Yeom G Y. Surf. Coat. Technol., 2000, (133-134): 612--616.
[28] Diserens M, Patscheider J, Levy F. Surf. Coat. Technol., 1998, (108-109): 241--246.
[29] 王建祺, 吴文辉, 冯大明. 电子能谱学(XPS/XAES/UPS)引论. 北京: 国防?工业出版社, 1992. 553.

Reactive Sputter Deposition of nc-TiN/a-Si₃N₄ Nanocomposite Films in a Magnetized Inductively Coupled Plasma

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