Journal of Inorganic Materials ›› 2019, Vol. 34 ›› Issue (11): 1231-1237.DOI: 10.15541/jim20190035
• RESEARCH LETTERS • Previous Articles Next Articles
LIAO Chun-Jing1,2,3,DONG Shao-Ming2(),JIN Xi-Hai2,HU Jian-Bao2,ZHANG Xiang-Yu2,WU Hui-Xia1
Received:
2019-01-17
Published:
2019-11-20
Online:
2019-05-22
Supported by:
CLC Number:
LIAO Chun-Jing, DONG Shao-Ming, JIN Xi-Hai, HU Jian-Bao, ZHANG Xiang-Yu, WU Hui-Xia. Deposition Temperature and Heat Treatment on Silicon Nitride Coating Deposited by LPCVD[J]. Journal of Inorganic Materials, 2019, 34(11): 1231-1237.
Fig. 2 Surface morphologies of silicon nitride coatings coated carbon fiber cloth at different temperatures (a, b) Original; (c, d) 750 ℃; (e, f) 950 ℃; (g, h) 1150 ℃
Fig. 3 Fracture morphologies of silicon nitride deposited on the carbon fiber cloth at different temperatures The left figures show outer coating morphologies of carbon fiber cloth while the right figures show their corresponding inner coating morphologies: (a) 750 ℃; (b) 850 ℃; (c) 950 ℃; (d) 1050 ℃; (e) 1150 ℃
Deposition temperature/℃ | Elemental type and elemental contents/at% | ||
---|---|---|---|
N | Si | O | |
750 | 53.21 | 30.78 | 16.01 |
850 | 46.92 | 43.25 | 9.82 |
950 | 43.67 | 43.49 | 12.84 |
1050 | 50.43 | 43.60 | 5.97 |
1150 | 49.88 | 46.87 | 3.24 |
Deposition temperature/℃ | Elemental type and elemental contents/at% | ||
---|---|---|---|
N | Si | O | |
750 | 53.21 | 30.78 | 16.01 |
850 | 46.92 | 43.25 | 9.82 |
950 | 43.67 | 43.49 | 12.84 |
1050 | 50.43 | 43.60 | 5.97 |
1150 | 49.88 | 46.87 | 3.24 |
Fig. 4 N1s and Si2P XPS spectra of silicon nitride coatings deposited at different temperatures (a-b) 750 ℃; (c-d) 950 ℃; (e-f) 1150 ℃; (a, c, e) NIS spectra; (b, d,f) Si2P spectra
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