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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Reactive Sputter Deposition of nc-TiN/a-Si
3
N
4
Nanocomposite Films in a Magnetized Inductively Coupled Plasma
FAN Qiu-Lin,ZHAO Hong-Yu,SONG Li-Xin,ZHANG Tao,HU Xing-Fang
Journal of Inorganic Materials . 2004, (
5
): 1080 -1086 .
