Photo catalytic Degradation Properties of Titanium Oxide Film Prepared by Mid-frequency AC Magnetron Sputtering

Abstract

Abstract: TiO₂ thin films were prepared successfully by mid-frequency AC reactive magnetron sputtering technique. AES, SEM and XRD were used to examine the composition, surface morphology and
microstructure of the TiO₂ film, respectively. The photocatalytic degradation property of TiO₂ film was investigated using methylene blue (MB) and methyl orange (MO) as the degradation object.
The results show that the ratio of O to Ti in the thin film is very close to 2:1. The TiO₂ thin film deposited at 250℃ is composed of anatase. TiO₂ thin films prepared in this paper can photocatalyticly
degrade MB, MO, and DDVP effectively. The TiO₂ thin film after 10 times used no deterioration of photocatalytic activity can be detected.

Key words: titanium oxide thin film, mid-frequency AC magnetron sputtering, photocatalytic degradation, methylene blue, methyl orange

CLC Number:

O484

HOU Ya-Qi,ZHANG Gong,ZHUANG Da-Ming,WU Min-Sheng. Photo catalytic Degradation Properties of Titanium Oxide Film Prepared by Mid-frequency AC Magnetron Sputtering[J]. Journal of Inorganic Materials.

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Photo catalytic Degradation Properties of Titanium Oxide Film Prepared by Mid-frequency AC Magnetron Sputtering

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