Crystallization and Structural Transformation of TiO2/SiO2 Composite Thin Films

Abstract

Abstract: The crystallization behavior and structural transformation of Sol-Gel TiO₂/SiO₂ thin films varing with composition, temperature, time were studied. With the increase of TiO₂ concentration,
the temperature of TiO₂ crystallization and the rate of structural transformation from anatase to rutile were decreased. The temperature of SiO₂ crystallization and the grain size of anatase
crystallites decreased and increased with the increase of TiO₂ concentration respectively, and the later one increased with annealing temperature as will. The grain size of TiO₂ crystallites was varied linearly
with the root square of annealing time. The difference of the rate of structural transformation from anatase to rutile depends on mainly the stress in the films.

Key words: Sol-Gel, composition film, crystallization, phase transformation

CLC Number:

O484

ZHAI Ji-Wei,ZHANG Liang-Ying,YAO Xi. Crystallization and Structural Transformation of TiO₂/SiO₂ Composite Thin Films[J]. Journal of Inorganic Materials.

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Crystallization and Structural Transformation of TiO₂/SiO₂ Composite Thin Films

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