Journal of Inorganic Materials

• Research Paper •     Next Articles

Recent Developments of Surface Coatings and Optical Fabrication of Silicon Carbide

LIU Gui-Ling1,2, HUANG Zheng-Ren1, LIU Xue-Jian1, DONG Shao-Ming1, JIANG Dong-Liang1   

  1. (1. Structural Ceramics Engineering Center of Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China; 2. Graduate University of the Chinese Academy of Sciences, Beijing 100049, China)
  • Received:2006-09-20 Revised:2006-11-16 Published:2007-09-20 Online:2007-09-20

Abstract: Surface coating and exploring new fabrication methods are two kinds of ordinary processes to achieve the fine optical surface of silicon carbide. Two main coating techniques of silicon carbide-based materials, CVD SiC and PVD Si on SiC surface are introduced, and the recent developments of silicon carbide optical fabrication methods are reviewed in detail.

Key words: silicon carbide, surface coatings, optical fabrication

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