Effects of Post-annealing Treatment on the Structural and Optical Properties of Cubic MgxZn1-xO Thin Films Grown on Sapphire

doi:10.3724/SP.J.1077.2006.00993

Abstract

Abstract: Single cubic-phase Mg_xZn_1-xO(x>0.5) alloy films were synthesized on c-plane
sapphire substrates by low temperature physical deposition. The effects of the post-annealing treatment on the structural properties of the films were investigated by the measurements of XRD and transmission spectra. Hexagonal-phase (wurtzite) MgZnO was observed segregating from the cubic-phase Mg_0.53Zn_0.47O film after annealing at 900℃, while no secondary phase was seen in the samples with Mg fraction exceeding 0.55. Electrical measurement indicates that cubic-phase Mg_0.55Zn_0.45O films can be used in metal-insulator-silicon (MIS) structures as insulators with low leakage current densities. It could be concluded that the cubic-phase Mg_xZn_1-xO films with x exceeding 0.55 are stable enough to be applied in fabricating high quality optoelectronic devices.

Key words: cubic MgxZn1-xO films, anneal, crystal structure, optical property, electrical property

CLC Number:

TB43

CHEN Nai-Bo,WU Hui-Zhen,XU Tian-Ning,YU Ping. Effects of Post-annealing Treatment on the Structural and Optical Properties of Cubic Mg_xZn_1-xO Thin Films Grown on Sapphire
[J]. Journal of Inorganic Materials, DOI: 10.3724/SP.J.1077.2006.00993.

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Effects of Post-annealing Treatment on the Structural and Optical Properties of Cubic Mg_xZn_1-xO Thin Films Grown on Sapphire

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