Epitaxial Layer-by-Layer Growth of BST Series Ferroelectric Thin Films at Low Temperature

Abstract

Abstract: SrTiO₃(STO), BaTiO₃(BTO) and Ba_0.6Sr_0.4TiO₃(BST)ferroelectric thin films were grown
epitaxilly on SrTiO₃(100) single crystal substrates by the laser molecular beam epitaxy(LMBE) method. The growth of the thin films was in-situ monitored with
reflective high energy electron diffraction(RHEED). By using atomic force microscopy(AFM) and RHEED the growth modes were investigated. With the
observation of the varieties of the RHEED intensity oscillations and the diffraction patterns the dynamic and the static crystallization temperature
was controled and confirmed, the epitaxial growth of STO, BTO and BST thin films in layer-by-layer mode was performed at temperatures of 280, 330 and 340℃,
respectively.

Key words: BST, ferroelectric thin films, low temperature, epitaxial growth

CLC Number:

O484

LI Jin-Long,LI Yan-Rong,ZHANG Ying,DENG Xin-Wu,LIU Xing-Zhao. Epitaxial Layer-by-Layer Growth of BST Series Ferroelectric Thin Films at Low Temperature[J]. Journal of Inorganic Materials.

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Epitaxial Layer-by-Layer Growth of BST Series Ferroelectric Thin Films at Low Temperature

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