Corrosion Behavior and Mechanism of LTCC Materials in Ca-B-Si System

doi:10.15541/jim20220513

Abstract

Abstract:

The corrosion resistance of LTCC (Low Temperature Co-fired Ceramics, LTCC) materials to acid/alkali bath in electroplating and electroless plating is an important characteristic that needs to be paid attention to in practical application. In this work, the effects of HCl, H₂SO₄ and NaOH concentration and immersion time on the corrosion behavior of Ca-B-Si based LTCC materials were studied. The results show that when LTCC samples are soaked in acid solution, the weight loss of samples increases firstly and then decreases with the increase of acid solution concentration. The weight loss in 1.00 mol/L hydrochloric acid solution is up to 54.96%, while that in 0.10 mol/L sulfuric acid solution is only 8.80%. However, no obvious corrosion is observed in the alkaline solution. The crystal phase of CaB₂O₄ and CaSiO₃ in LTCC material dissolves in the acid solution to induce corrosion. With the increase of acid solution concentration, formation of Si-rich alteration layer on the surface of the sample after corrosion becomes faster, while the passivation alteration layer makes the weight loss in higher concentration of acid solution relatively low. Apparent activation energies of LTCC material in 1 mol/L hydrochloric acid solution, and 0.1 mol/L sulfuric acid solution are 20.38, 5.43 kJ/mol, respectively, indicating the corrosion rate of LTCC material in hydrochloric acid solution is higher than that in sulfuric acid solution. Combined with chemical corrosion reaction kinetics and thermodynamic results, this study reveales that the corrosion mechanism of LTCC materials in acid solution is dominated by ion exchange and hydrolysis reaction.

Key words: low temperature co-fired ceramics, borosilicate glass, soak, corrosion mechanism

CLC Number:

TQ174

LUO Shuwen, MA Mingsheng, LIU Feng, LIU Zhifu. Corrosion Behavior and Mechanism of LTCC Materials in Ca-B-Si System[J]. Journal of Inorganic Materials, 2023, 38(5): 553-560.

Figures/Tables 8

Fig. 1 Variation of weight loss with corrosion time after corrosion of samples in different concentrations of acid solutions (a) HCl solution; (b) H2SO4 solution

Fig. 2 XRD patterns of samples before and after corrosion for different time in various solutions (a) 1.00 mol/L HCl solution; (b) 0.10 mol/L H2SO4 solution; (c) NaOH solutions at different concentrations

Fig. 3 Kinds and contents of elements entering the solutions after the samples being corroded in different concentrations of HCl, H2SO4 and NaOH solutions for 300 min Colorful figures are available on website

Fig. 4 SEM images of samples in different concentrations of HCl solutions before corrosion and after corrosion for different time (a) 0.50 mol/L HCl solution; (b) 1.00 mol/L HCl solution; (c) 2.00 mol/L HCl solution

Fig. 5 Phase compositions and elemental distributions of sample surfaces before and after corrosion in different solutions (a) No corrosion; (b) Corrosion in 1.00 mol/L HCl solution for 300 min; (c) Corrosion in 0.10 mol/L H2SO4 solution for 300 min; (d) Corrosion in 2.00 mol/L NaOH solution for 300 min

Fig. 6 Arrhenius plots of weight loss rate of the sample as a function of temperature in 1.00 mol/L HCl solution and 0.10 mol/L H2SO4 solution

Fig. 7 Raman spectra of samples before and after corrosion in different acid solutions for different time (a) 1.00 mol/L HCl solution; (b) 0.10 mol/L H2SO4 solution

Fig. 8 Corrosion mechanism diagram of LTCC material sample

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