Journal of Inorganic Materials ›› 2023, Vol. 38 ›› Issue (5): 553-560.DOI: 10.15541/jim20220513

• RESEARCH ARTICLE • Previous Articles     Next Articles

Corrosion Behavior and Mechanism of LTCC Materials in Ca-B-Si System

LUO Shuwen1,2(), MA Mingsheng2(), LIU Feng2, LIU Zhifu2()   

  1. 1. College of Chemistry and Materials Science, Shanghai Normal University, Shanghai 200234, China
    2. Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 201899, China
  • Received:2022-09-02 Revised:2022-10-10 Published:2022-12-27 Online:2022-12-27
  • Contact: MA Mingsheng, associate professor. E-mail:;
    LIU Zhifu, professor. E-mail:
  • About author:LUO Shuwen (1998-), female, Master candidate. E-mail:
  • Supported by:
    National Natural Science Foundation of China(61971407);Shanghai Rising-Star Program(20QA1410200)


The corrosion resistance of LTCC (Low Temperature Co-fired Ceramics, LTCC) materials to acid/alkali bath in electroplating and electroless plating is an important characteristic that needs to be paid attention to in practical application. In this work, the effects of HCl, H2SO4 and NaOH concentration and immersion time on the corrosion behavior of Ca-B-Si based LTCC materials were studied. The results show that when LTCC samples are soaked in acid solution, the weight loss of samples increases firstly and then decreases with the increase of acid solution concentration. The weight loss in 1.00 mol/L hydrochloric acid solution is up to 54.96%, while that in 0.10 mol/L sulfuric acid solution is only 8.80%. However, no obvious corrosion is observed in the alkaline solution. The crystal phase of CaB2O4 and CaSiO3 in LTCC material dissolves in the acid solution to induce corrosion. With the increase of acid solution concentration, formation of Si-rich alteration layer on the surface of the sample after corrosion becomes faster, while the passivation alteration layer makes the weight loss in higher concentration of acid solution relatively low. Apparent activation energies of LTCC material in 1 mol/L hydrochloric acid solution, and 0.1 mol/L sulfuric acid solution are 20.38, 5.43 kJ/mol, respectively, indicating the corrosion rate of LTCC material in hydrochloric acid solution is higher than that in sulfuric acid solution. Combined with chemical corrosion reaction kinetics and thermodynamic results, this study reveales that the corrosion mechanism of LTCC materials in acid solution is dominated by ion exchange and hydrolysis reaction.

Key words: low temperature co-fired ceramics, borosilicate glass, soak, corrosion mechanism

CLC Number: