Influences of Heat Treatment on the Structure of PMNT Thin Films Derived by Sol-Gel Process

Journal of Inorganic Materials

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Influences of Heat Treatment on the Structure of PMNT Thin Films Derived by Sol-Gel Process

DI Li-Feng; DING Ai-Li. HE Xi-Yun; LUO Wei-Gen

Laboratory of Functional Inorganic Materials; Shanghai Institute of Ceramics; Chinese Academy of Sciences. Shanghai 200050; China

Received:2001-03-16 Revised:2001-04-16 Published:2002-03-20 Online:2002-03-20

Abstract

Abstract: PMNT (Lead Magnesium Niobate Titanate) thin films with preferred orientation were deposited on Pt/TiO₂/SiO₂/Si substrate by a sol-gel process. The influence of the technological process on morphology, crystallization and orientation of films were investigated by XRD(X Ray Diffraction) and SPM(Scan Probe Microscope). The optimum process for preparing PMNT thin film with high orientation was established.

Key words: relax ferroelectrics, sol-gel, pyrolysis, annealing

CLC Number:

O484

DI Li-Feng,DING Ai-Li. HE Xi-Yun,LUO Wei-Gen. Influences of Heat Treatment on the Structure of PMNT Thin Films Derived by Sol-Gel Process[J]. Journal of Inorganic Materials.

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Influences of Heat Treatment on the Structure of PMNT Thin Films Derived by Sol-Gel Process

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