Effect of Annealing Conditions on Thermoelectric Properties of Magnetron Sputtered MgO-Ag3Sb-Sb2O4 Flexible Films

doi:10.15541/jim20220107

Abstract

Abstract:

MgAgSb is a promising room temperature thermoelectric material with relatively abundant element reserves for the construction of high-performance wearable thermoelectric batteries. In this study, Mg-Ag-Sb thin films were prepared on polyimide (PI) substrates by using magnetron sputtering, and the effects of annealing conditions on their thermoelectric properties were systematically investigated. The results showed that the MgAgSb flexible thermoelectric film composed of MgO, Ag₃Sb and Sb₂O₄ multiphases instead of pure phase, in which Ag₃Sb played main role of thermoelectric function. Different annealing atmospheres significantly improved the thermoelectric properties of MgO-Ag₃Sb-Sb₂O₄ (Mg-Ag-Sb) flexible thin films, among which the vacuum treatment appeared the best performance. Under vacuum conditions, the thermoelectric properties firstly increased and then decreased with the annealing temperature increasing, and the best thermoelectric property was achieved when the annealing temperature was 573 K, with a power factor of 74.16 μW∙m^-1∙K^-2 near room temperature. Moreover, the film exhibited good flexibility, and the conductivity changed by only 14% after 900 bending times. This study provides a reference for the preparation of MgAgSb flexible thermoelectric films and their wearable applications.

Key words: MgAgSb, annealing treatment, thermoelectric property, flexible film

CLC Number:

O472

LIU Dan, ZHAO Yaxin, GUO Rui, LIU Yantao, ZHANG Zhidong, ZHANG Zengxing, XUE Chenyang. Effect of Annealing Conditions on Thermoelectric Properties of Magnetron Sputtered MgO-Ag₃Sb-Sb₂O₄ Flexible Films[J]. Journal of Inorganic Materials, 2022, 37(12): 1302-1310.

Figures/Tables 13

Fig. 1 XRD patterns of VAC523, H2/N2523 and N2523

Fig. 2 Surface SEM images of MAS-0 (a), VAC523 (b), H2/N2523 (c), and N2523 (d)

Fig. 3 EDS spectrum of surface particles on VAC523

Fig. 4 Cross-sectional SEM images of MAS-0 (a), VAC523 (b), H2/N2523 (c), and N2523 (d)

Fig. 5 Testing temperature dependent Seebeck coefficient (a), electrical conductivity (b), power factor(c) of VAC523, H2/N2523 and N2523, and thermoelectric parameters (d) of MAS-0

Fig. 6 Testing temperature dependent carrier concentration and mobility of VAC523(a), H2/N2523(b) and N2523(c)

Fig. 7 XRD patterns of VACx films

Fig. 8 Surface SEM images of VACx (x=548 (a), 573 (b), 598 (c), 623 (d)) films, and high magnification surface SEM image of VAC573 film (e)

Fig. 9 Cross-sectional SEM images of VACx (x=548 (a), 573 (b), 598 (c), 623 (d)) films

Fig. 10 Testing temperature dependent Seebeck coefficient (a), electrical conductivity (b) and power factor (c) of VACx (x=523, 548, 573, 598)

Fig. 11 Testing temperature dependent carrier concentration and mobility of VACx(x=523 (a), 548 (b), 573 (c), 598 (d))

Fig. 12 Electrical conductivity of VAC573 film varied with bending times

Fig. 13 Surface SEM images of VAC573 film with different bending times (a) 400; (b) 600; (c) 900; (d) 1500

References 30

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Effect of Annealing Conditions on Thermoelectric Properties of Magnetron Sputtered MgO-Ag₃Sb-Sb₂O₄ Flexible Films

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