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无机材料学报

无机材料学报

• 研究论文 • 上一篇    下一篇

Lanxide技术合成AlN材料的反应过程及组织特征

王群; 王文忠; 高钦+; 沈玉辉+; 陈建峰+   

  1. 东北大学材料与冶金学院; 沈阳110006; +大连理工大学材料系; 大连116023
  • 收稿日期:1995-10-24 修回日期:1995-11-27 出版日期:1997-02-20 网络出版日期:1997-02-20

Reaction Process and Characteristics of Microstructure of AlN Composite Synthesized by Lanxide Method

WANG Qun; WANG Wenzhong; GAO Qin+; SHEN Yuhui+; CHEN Jianfeng+   

  1. School of Materials Metallurpy; Northeastern University Shenyang 110006 China; +DePartment of Matcrials Science and Engincering; Dalian University of Science and Technology Dalian 116023 China
  • Received:1995-10-24 Revised:1995-11-27 Published:1997-02-20 Online:1997-02-20

PDF (PC)

956

被引次数

21

摘要： 本文分析了以Lanxide技术合成AlN的生长过程，发现AlN晶体生长具有明显的方向性，XRD分析表明：AlN晶体的生长方向为[0001]晶向.反应过程中AlN由基体表面向气氛中不断深入生长，形成了纤维状或称柱状晶体组织.反应初期Mg元素的挥发非常强烈，Mg蒸气参与表面反应，生成一层疏松的复相表层，有利于反应的深入进行.氮化过程中Si元素存在富集现象，造成宏观组织的成份不均匀性.

关键词: 反应, 生长, AlN, 合金

Abstract: The growth process of AlN synthesized by Lanxide method was studied. XRD analysis shows that AlN crystal grows in a specific direction [0001]. During nitridation, AlN crystal grew from the metal base surface toward atmosphere, then formed a parallel and rod-like microstructure. Durillg initia1 reaction, there was a significant Mg-evaporation phenomenon, and magnesium gas reacted with nitrogen or oxygen to form a porous and loosen surface layer. It was also found that there was a Si-rich process during nitridation which caused composition unhomogenity in product.

Key words: AlN aluminum, alloy, reaction, growth