无机材料学报

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低分子聚碳硅烷气相热裂解制备SiC超微粉的研究

谢凯; 张长瑞; 陈朝辉; 周安郴; 盘毅   

  1. 国防科技大学材料工程与应用化学系; 长沙410073
  • 收稿日期:1996-03-15 修回日期:1996-04-16 出版日期:1997-06-20 网络出版日期:1997-06-20

Synthesis of SiC Ultrafine Powders by Thermal Decomposition of LPS

XIE Kai; ZHANG Changrui; CHEN Chaohui; ZHOU Anchen; PAN Yi   

  1. Department of Materials Egg. Applied Chemistry; Notional University of defenseTechnology Changsha 410073 China
  • Received:1996-03-15 Revised:1996-04-16 Published:1997-06-20 Online:1997-06-20

摘要: 本研究以低分子聚碳硅烷(LPS)为原料,利用其原料的特点,采用气相热裂解方法制备出SiC超细微粉.并从热力学和动力学的角度探讨了LPS分解机理,对合成工艺条件对产物的性质以及形貌、组成等的影响进行了系统的讨论,并在实验中确定了较佳的工艺条件.所合成的无定形SiC超微粉:粒径<0.1μm,球形,含碳34%~35%,含氧3%~4%左右.

关键词: 低分子聚碳硅烷, 气相裂解, 碳化硅, 超微粉, 无定形

Abstract: Fine amorphous silicon carbide powders were prepared by vapor phase decomposition fromthe low-molecular polysilane(LPS). The pyrolysis mechanism of LPS under Ar atmosphere andthe influence of the pyrolysis conditions (temperature, duration, LPS and Ar gas flowing rate)were discussed. The silicon carbide fine powder less than 0.1μm obtAlNed after pyrolysis processis amorphous with 34%~35% carbon and 3%~4% oxygen.

Key words: silicon carbide, fine powder, amorphous, vapor phase decomposition, low-molecularpolysilane