先进光源装置用碳化硅反射镜性能研究

doi:10.15541/jim20250354

无机材料学报

先进光源装置用碳化硅反射镜性能研究

刘雷敏¹, 罗红心², 何玉梅², 金利民², 李永杰¹, 刘静雯², 魏玉全¹，孙安乐¹，陈忠明¹, 刘学建¹, 殷杰¹, 黄政仁^1,2

1.中国科学院上海硅酸盐研究所,上海 200050;
2.中国科学院上海高等研究院, 上海 201210

收稿日期:2025-09-08 修回日期:2025-11-09
通讯作者: 殷杰,研究员. E-mail: jieyin@mail.sic.ac.cn; 黄政仁,研究员. E-Mail: zhrhuang@mail.sic.ac.cn
作者简介:刘雷敏(1987-),男,高级工程师. E-mail: leiminliu@mail.sic.ac.cn
基金资助:
国家自然科学基金(U23A20563, 52172077); 国家重点研发计划 (2024YFB3714704)

Performance of Silicon Carbide Mirrors for Advanced Light Source Devices

LIU Leimin¹, LUO Hongxin², HE Yumei², JIN Limin², LI Yongjie¹, LIU Jingwen², WEI Yuquan¹, SUN Anle¹, CHEN Zhongming¹, LIU Xuejian¹, YIN Jie¹, HUANG Zhengren^1,2

1. Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China;
2. Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201210, China

Received:2025-09-08 Revised:2025-11-09
Contact: YIN Jie, Professor. E-mail: jieyin@mail.sic.ac.cn; HUANG Zhengren, Professor. E-Mail:zhrhuang@mail.sic.ac.cn
About author:LIU Leimin (1987-), male, Senior engineer. E-mail: leiminliu@mail.sic.ac.cn
Supported by:
National Natural Science Foundation of China (U23A20563, 52172077); National Key R&D Program of China (2024YFB3714704)

摘要/Abstract

摘要： 随着同步辐射、X射线自由电子激光等先进光源技术的快速发展,特别是高能、高亮度的X射线装置面临的挑战日益突出。高能光束照射到反射镜表面时,高能量吸收会导致反射镜出现辐射损伤和热变形等现象,已成为限制光束线性能提升的关键因素之一。本研究从反射镜的结构设计、材料优选、性能模拟、样件制备、光学加工及性能检测等方面进行了深入探讨,采用固相烧结结合精密光学加工技术,研制了具备优异光学性能的碳化硅平面反射镜,分析了不同材料对反射镜面热变形的影响,以及反射镜面形精度和光洁度控制对光学表面质量的影响。研究表明：在吸收功率为200 W工况下,改性碳化硅反射镜与通用单晶硅反射镜相比,镜面子午方向上的法向变形降低约22%;经光学加工后,其镜面PV值达24.3 nm、RMS值达1.7 nm ,表面粗糙度RMS达0.168 nm,释气率为2.40×10^-7Pa∙L/(s∙cm²)。这些性能满足先进光源装置对超光滑反射镜的使用要求,有望推动高性能碳化硅陶瓷成为继单晶硅之后新一代先进光源装置反射镜的理想材料。

关键词: 同步辐射, X射线自由电子激光, 碳化硅反射镜, 面形精度, 粗糙度

Abstract: The rapid development of advanced light source technologies, such as synchrotron radiation and X-ray free electron lasers, especially for high-energy and high-brightness X-ray facilities, has become one of the key factors restricting the further improvement of beamline performance. When high-energy beams are irradiated onto the surface of mirrors, the absorption of such energy can cause radiation damage and thermal deformation of the mirrors. This study provides an in-depth exploration of various aspects, including the structural design of mirrors, material selection, performance simulation, prototype fabrication, optical processing, and performance testing. By combining solid-state sintering with precision optical processing technology, a silicon carbide (SiC) planar mirror with high optical property was developed. The influence of different materials on the thermal deformation of the reflective mirror surface, as well as the impact of surface shape accuracy and roughness control on the optical surface quality of the reflective mirror was discussed. The research shows that under an absorbed power of 200 W, the modified SiC mirror exhibits approximately 22% reduction in normal deformation along the meridional direction compared to conventional single-crystal silicon mirrors. After optical processing, the PV value of its mirror surface reached 24.3 nm, the RMS value reached 1.7 nm, the surface roughness RMS reached 0.168 nm, and the gas release rate was 2.40×10^-7 Pa∙L/(s∙cm²). These results meet the requirements for ultra-smooth mirrors in advanced light source facilities, demonstrating the potential of high-performance silicon carbide ceramics as an ideal choice for mirrors for the next-generation applications, instead of single-crystal silicon.

Key words: synchrotron radiation, X-ray free electron laser, silicon carbide mirrors, surface shape accuracy, roughness

中图分类号:

TH743

刘雷敏, 罗红心, 何玉梅, 金利民, 李永杰, 刘静雯, 魏玉全, 孙安乐, 陈忠明, 刘学建, 殷杰, 黄政仁. 先进光源装置用碳化硅反射镜性能研究[J]. 无机材料学报, DOI: 10.15541/jim20250354.

LIU Leimin, LUO Hongxin, HE Yumei, JIN Limin, LI Yongjie, LIU Jingwen, WEI Yuquan, SUN Jiale, CHEN Zhongming, LIU Xuejian, YIN Jie, HUANG Zhengren. Performance of Silicon Carbide Mirrors for Advanced Light Source Devices[J]. Journal of Inorganic Materials, DOI: 10.15541/jim20250354.

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