钽酸锂晶圆减薄技术及其热释电红外探测器应用进展

doi:10.15541/jim20250381

摘要/Abstract

摘要： 钽酸锂(LiTaO₃, LT)作为一种重要的多功能铁电材料,以其优异的热释电系数、稳定的物理化学特性及宽波段光谱响应,在红外探测器、热成像传感器等领域发挥着关键作用。近年来,随着微电子机械系统(MEMS)与集成光子学技术的迅速发展,传感器与探测系统正朝着小型化、集成化与高性能化的方向不断演进。在此背景下,作为热释电器件核心敏感单元的材料,由传统块体晶体逐步转向高质量的LT单晶薄膜,以实现更优的热学管理与电学性能。本文系统综述了LT单晶的关键减薄技术发展脉络,涵盖了从传统的机械研磨减薄、化学机械抛光(CMP),到新兴的离子切片与智能剥离(Smart-Cut)等先进工艺。重点分析了各技术路径的原理、可实现的薄膜厚度、晶体质量及其优缺点。在此基础上,本文进一步探讨了减薄后的LT薄膜在热释电探测器中的应用优势与性能表现。最后,梳理了当前LT单晶薄膜制备与集成所面临的技术挑战,并展望了未来技术的发展方向,旨在为新一代高性能、微型化热释电器件的研发提供参考。

关键词: 钽酸锂单晶, 机械减薄, 智能剥离, 热释电探测器, 综述

Abstract: Lithium tantalate (LiTaO₃, LT) stands as a significant multifunctional ferroelectric material, playing a critical role in infrared detectors and thermal imaging sensors, owing to its outstanding pyroelectric coefficient, stable physicochemical properties, and broad-band spectral response. In recent years, rapid advancements in micro-electromechanical systems (MEMS) and integrated photonics have driven the evolution of sensor and detection systems toward miniaturization, integration, and high performance. Consequently, the core sensing material of pyroelectric devices has progressively shifted from traditional bulk crystals to high-quality LT single-crystal films, aiming to achieve superior thermal management and electrical performance. This article systematically reviews the development of key thinning technologies for LT single crystals, covering a range of processes from conventional mechanical grinding and chemical mechanical polishing (CMP) to emerging advanced techniques such as crystal ion slicing and the Smart-Cut process. It includes a focused analysis of the principles underlying each technical route, the achievable film thickness, crystal quality, and their respective advantages and limitations. Building on this foundation, the paper further discusses the application advantages and performance of thinned LT films in pyroelectric detectors. Finally, the review outlines the current technical challenges associated with the fabrication and integration of ultra-thin LT single crystals and offers perspectives on future development directions. The review provide a valuable reference for the development of next-generation, high-performance, miniaturized pyroelectric devices.

Key words: lithium tantalate single crystal, mechanical thinning, Smart-Cut, pyroelectric detector, review

中图分类号:

TN304

胡钰晴, 朱一新, 乐先浩, 万青. 钽酸锂晶圆减薄技术及其热释电红外探测器应用进展[J]. 无机材料学报, DOI: 10.15541/jim20250381.

HU Yuqing, ZHU Yixin, LE Xianhao, WAN Qing. Lithium Tantalate Wafer: Advances in Thinning Technology and Application in Pyroelectric Infrared Detectors[J]. Journal of Inorganic Materials, DOI: 10.15541/jim20250381.

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