钽酸锂晶圆减薄技术及其热释电红外探测器应用进展

doi:10.15541/jim20250381

无机材料学报 ›› 2026, Vol. 41 ›› Issue (6): 764-774.DOI: 10.15541/jim20250381

钽酸锂晶圆减薄技术及其热释电红外探测器应用进展

胡钰晴¹^,²(), 朱一新¹^,², 乐先浩¹, 万青¹()

¹ 甬江实验室, 宁波 315201
² 中国科学技术大学微电子学院, 合肥 230026

收稿日期:2025-09-28 修回日期:2025-11-20 出版日期:2026-06-20 网络出版日期:2025-12-11
通讯作者: 万青, 研究员. E-mail: qing-wan@ylab.ac.cn
作者简介:胡钰晴(1995-), 女, 博士. E-mail: yuqing-hu@ylab.ac.cn
基金资助:
浙江省重点研发计划(2024SSYS0042);浙江省重点研发计划(2024SSYS0043);浙江省自然科学基金(LQN26F040003);浙江省引进和培育创新创业领军团队(2023R01011)

Lithium Tantalate Wafer: Advances in Thinning Technology and Application in Pyroelectric Infrared Detectors

HU Yuqing¹^,²(), ZHU Yixin¹^,², LE Xianhao¹, WAN Qing¹()

¹ Yongjiang Laboratory, Ningbo 315201, China
² School of Microelectronics, University of Science and Technology of China, Hefei 230026, China

Received:2025-09-28 Revised:2025-11-20 Published:2026-06-20 Online:2025-12-11
Contact: WAN Qing, professor. E-mail: qing-wan@ylab.ac.cn
About author:HU Yuqing (1995-), female, PhD. E-mail: yuqing-hu@ylab.ac.cn
Supported by:
Key R&D Program of Zhejiang(2024SSYS0042);Key R&D Program of Zhejiang(2024SSYS0043);Zhejiang Provincial Natural Science Foundation(LQN26F040003);Zhejiang Province Introduces and Cultivates Leading Innovation and Entrepreneurship Teams(2023R01011)

摘要/Abstract

摘要：

钽酸锂(LiTaO₃, LT)作为一种重要的多功能铁电材料, 以其优异的热释电系数、稳定的物理化学特性及宽波段光谱响应, 在红外探测器、热成像传感器等领域发挥着关键作用。近年来, 随着微电子机械系统(MEMS)与集成光子学技术的迅速发展, 传感器与探测系统正朝着小型化、集成化与高性能化的方向不断演进。在此背景下, 作为热释电器件核心敏感单元材料, 传统块体晶体逐步转向高质量LT单晶薄膜, 以实现更优的热学管理与电学性能。本文系统综述了LT单晶的关键减薄技术发展脉络, 涵盖从传统的机械研磨减薄、化学机械抛光(CMP), 到新兴的离子切片与智能剥离(Smart-Cut)等先进工艺, 重点分析了各技术路径的原理、可实现的薄膜厚度、晶体质量及其优缺点。在此基础上, 本文进一步探讨了减薄后的LT薄膜在热释电探测器中的应用优势与性能表现。最后, 梳理了当前LT单晶薄膜制备与集成所面临的技术挑战, 并展望了未来技术的发展方向, 旨在为新一代高性能、微型化热释电器件的研发提供参考。

关键词: 钽酸锂单晶, 机械减薄, 智能剥离, 热释电探测器, 综述

Abstract:

Lithium tantalate (LiTaO₃, LT) stands as a significant multifunctional ferroelectric material, playing a critical role in infrared detectors and thermal imaging sensors, owing to its outstanding pyroelectric coefficient, stable physicochemical properties, and broad-band spectral response. In recent years, rapid advancements in micro-electromechanical systems (MEMS) and integrated photonics have driven the evolution of sensor and detection systems toward miniaturization, integration, and high performance. Consequently, the core sensing material of pyroelectric devices has progressively shifted from traditional bulk crystals to high-quality LT single-crystal films, aiming to achieve superior thermal management and electrical performance. This article systematically reviews the development of key thinning technologies for LT single crystals, covering a range of processes from conventional mechanical grinding and chemical mechanical polishing (CMP) to emerging advanced techniques such as crystal ion slicing and the Smart-Cut process. It includes a focused analysis of principles underlying each technical route, achievable film thickness, crystal quality, and their respective advantages and limitations. Building on this foundation, the paper further discusses the application advantages and performance of thinned LT films in pyroelectric detectors. Finally, the review outlines the current technical challenges associated with the fabrication and integration of ultra-thin LT single crystals and offers perspectives on future development directions. This review provides a valuable reference for the development of next-generation, high-performance, and miniaturized pyroelectric devices.

Key words: lithium tantalate single crystal, mechanical thinning, Smart-Cut, pyroelectric detector, review

中图分类号:

TN304

胡钰晴, 朱一新, 乐先浩, 万青. 钽酸锂晶圆减薄技术及其热释电红外探测器应用进展[J]. 无机材料学报, 2026, 41(6): 764-774.

HU Yuqing, ZHU Yixin, LE Xianhao, WAN Qing. Lithium Tantalate Wafer: Advances in Thinning Technology and Application in Pyroelectric Infrared Detectors[J]. Journal of Inorganic Materials, 2026, 41(6): 764-774.

图/表 8

表1 LiTaO3与常见热释电材料性能对比[1-2,4 -5]

Table 1 Comparison of performance between LiTaO3 and common pyroelectric materials[1-2,4 -5]

Type	Material	p/(µC·m^-2·K^-1)	T_c/℃	F_v/(m²·C^-1)
Single crystal	LiTaO₃	230	630	0.170
	LiNbO₃	83	1210	0.103
	Triglycine sulfate (TGS)	550	50	0.43
	Deuterated triglycine sulfate (DTGS)	264	61	0.48
	Pb(Zr_0.55Ti_0.45)O₃	330	340	0.02
	0.41Pb(In_1/2Nb_1/2)O₃-0.17Pb[(Mg_1/3Nb_2/3)_xTi₁₋_x]O₃-0.42PbTiO₃ (001)	570	253	0.05
Ceramic	0.75Pb(Mg_1/3Nb_2/3)O₃-0.25PbTiO₃	746	130	0.016
	BaTiO₃	200	120	0.005
	Sr_0.5Ba_0.5Nb₂O₆	205	90	0.018
	0.8(Bi_0.5Na_0.5)TiO₃-0.2BaTiO₃	242	209	0.027

表2 机械减薄与智能剥离技术对比[21-23]

Table 2 Comparison between mechanical thinning and Smart-Cut techniques[21-23]

Technology	Process principle	Technical feature	Mainstream wafer size	Achievable thickness
Mechanical thinning	Material removal from a bulk substrate via grinding and polishing	Low cost, high efficiency, straightforward process	4-12 inch	Tens to hundreds of micrometers
Smart-Cut	Transfer of a single-crystal layer via steps like ion implantation, bonding, and exfoliation	Enabling ultra-thin single- crystal transfer with low crystal defect density and high quality	4/6 inch (mature), advancing toward 8 inch	Sub-micrometer to nanometer scale

图1 机械减薄工艺流程示意图

Fig. 1 Schematic diagram of mechanical thinning process steps

图2 智能剥离技术流程示意图

Fig. 2 Schematic diagram of Smart-Cut process steps

图3 热释电效应的工作机理图[52]

Fig. 3 Working mechanism diagrams of pyroelectric effect[52] (a) Spontaneous polarization of pyroelectric materials induced by internal electric dipoles; (b) Decreased spontaneous polarization with dT/dt>0 which drives the migration of electrons in the external circuit; (c) Internal electric field with dT/dt=0 caused by spontaneous polarization in pyroelectric material and the induced external electric field in two electrodes, reaching equilibrium; (d) dT/dt<0, enhancing the spontaneous polarization and breaking the electrical balance again, and then causing reverse electrons migration

表3 基于不同厚度LiTaO3单晶的探测器性能[15,29,41,58 -59]

Table 3 Performance of detectors based on LiTaO3 single crystals with different thicknesses[15,29,41,58 -59]

Thickness/μm	R_V/(V·W^-1)	D^*/(cm·Hz^1/2·W^-1)	NEP/(W·Hz^-1/2)	Operating frequency/Hz	Ref.
500	1.80×10³	9.97×10⁶	5.02×10^-8	10	[29]
500	3.33×10²	9.92×10⁶	5.01×10^-8	70	[29]
75	2.2×10³	2.3×10⁷	/	5.3	[58]
75	1.12×10³	3.2×10⁷	/	26.3	[58]
12	1.54×10⁴	3.8×10⁷	/	12.3	[59]
12	1.02×10⁴	8.34×10⁷	/	53.8	[59]
9	8×10⁵	2×10⁹	/	/	[15]
0.770	2.9×10³	2.8×10⁷	/	10	[41]
0.770	6.3×10³	2.49×10⁸	/	200	[41]

图4 不同类型的热释电探测器结构[1]

Fig. 4 Different types of pyroelectric detector structures[1] (a) Schematic diagram of a single-element pyroelectric detector; (b) Image of a pyroelectric detector using a 2mm×2mm LT element; (c) Pyroelectric detector consisting of two compensated active elements and sensitive element; (d) Linear array using LT element and compensation element

图5 基于LT单晶的热释电探测器应用[67-68]

Fig. 5 Application of pyroelectric detector based on LT single crystal[67-68] (a-c) Device basing on LT crystal slice[67]: (a) three dimension device structures, (b) simulation result of the temperature changing, and (c) response voltage and NEP parameters at different chopper frequencies; (d-f) Device basing on LT thin film[67]: (d) three dimension device structures, (e) simulation result of the temperature changing, and (f) response voltage and NEP parameters at different chopper frequencies; (g) Schematic of the experimental setup[68]; (h) Linear response of detector under terahertz high-energy pulses (the empty blue circle and red square represent the test results of standard detector and sensitivity-reduced detector, respectively)[68]

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钽酸锂晶圆减薄技术及其热释电红外探测器应用进展

Lithium Tantalate Wafer: Advances in Thinning Technology and Application in Pyroelectric Infrared Detectors

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