非晶LiSiON薄膜电解质的全固态薄膜锂电池性能

doi:10.15541/jim20210132

无机材料学报 ›› 2022, Vol. 37 ›› Issue (2): 230-236.DOI: 10.15541/jim20210132 CSTR: 32189.14.10.15541/jim20210132

• 研究快报 • 上一篇

非晶LiSiON薄膜电解质的全固态薄膜锂电池性能

夏求应, 孙硕, 昝峰, 徐璟, 夏晖

南京理工大学材料科学与工程学院, 南京 210094

收稿日期:2021-03-06 修回日期:2021-05-06 出版日期:2022-02-20 网络出版日期:2021-06-10
作者简介:夏求应(1991-), 男, 博士. E-mail: qiuyingxia@njust.edu.cn

Amorphous LiSiON Thin Film Electrolyte for All-solid-state Thin Film Lithium Battery

XIA Qiuying, SUN Shuo, ZAN Feng, XU Jing, XIA Hui

School of Materials Science and Engineering, Nanjing University of Science and Technology, Nanjing 210094, China

Received:2021-03-06 Revised:2021-05-06 Published:2022-02-20 Online:2021-06-10
Contact: XIA Hui, professor. E-mail: xiahui@njust.edu.cn
About author:XIA Qiuying (1991-), male, PhD. E-mail: qiuyingxia@njust.edu.cn
Supported by:
National Key R&D Program of China (2020YFB2007400); National Natural Science Foundation of China (51802159, 51972174, 52002183)

摘要/Abstract

摘要： 全固态薄膜锂电池(TFLB)是理想的微电子系统电源。目前报道的固态非晶电解质存在离子电导率偏低的问题, 限制了TFLB性能的提升。本工作采用磁控溅射法制备了一种新型非晶锂硅氧氮(LiSiON)薄膜用作TFLB的固态电解质。结果表明, 优化制备条件后的LiSiON薄膜具有6.3×10^-6 S∙cm^-1的高离子电导率以及超过5 V的宽电压窗口, 适合作为TFLB的电解质。在LiSiON薄膜电解质的基础上, 本工作构建了MoO₃/LiSiON/Li TFLB并获得高的比容量(50 mA∙g^-1下282 mAh∙g^-1)、良好的倍率性能(800 mA∙g^-1下50 mAh∙g^-1)和可观的循环寿命(200次循环后容量保持率为78.1%), 验证了该电解质在薄膜电池中应用的可行性。

关键词: LiSiON, 薄膜电解质, 全固态锂电池, 薄膜电池

Abstract: All-solid-state thin film lithium battery (TFLB) is regarded as the ideal power source for microelectronic devices. However, the relatively low ionic conductivity of amorphous solid-state electrolyte limits the improvement of electrochemical performance for TFLB. In this work, amorphous lithium silicon oxynitride (LiSiON) thin films are prepared by magnetron sputtering as solid-state electrolyte for TFLB. With optimized deposition condition, the LiSiON thin film exhibits a high ionic conductivity of 6.3×10^-6 S∙cm^-1 at room temperature and a wide voltage window over 5 V, making it a suitable thin film electrolyte for TFLB. A MoO₃/LiSiON/Li TFLB is constructed based on the LiSiON thin film electrolyte with large specific capacity (282 mAh∙g^-1 at 50 mA∙g^-1), good rate capability (50 mAh∙g^-1 at 800 mA∙g^-1), and acceptable cycle life (78.1% capacity retention after 200 cycles), demonstrating the feasibility of this electrolyte for practical applications.

Key words: LiSiON, thin film electrolyte, all-solid-state lithium battery, thin film battery

中图分类号:

TQ174

夏求应, 孙硕, 昝峰, 徐璟, 夏晖. 非晶LiSiON薄膜电解质的全固态薄膜锂电池性能[J]. 无机材料学报, 2022, 37(2): 230-236.

XIA Qiuying, SUN Shuo, ZAN Feng, XU Jing, XIA Hui. Amorphous LiSiON Thin Film Electrolyte for All-solid-state Thin Film Lithium Battery[J]. Journal of Inorganic Materials, 2022, 37(2): 230-236.

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非晶LiSiON薄膜电解质的全固态薄膜锂电池性能

Amorphous LiSiON Thin Film Electrolyte for All-solid-state Thin Film Lithium Battery

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