无机材料学报

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基于液态金属镓制备二维氮化镓及其光电性能研究

李泽熙, 卢文杰, 王朝, 张璐, 李述体, 高芳亮   

  1. 华南师范大学 工学部,电子科学与工程学院(微电子学院),广州 510631
  • 收稿日期:2025-05-15 修回日期:2025-07-03
  • 通讯作者: 高芳亮, 研究员. E-mail: gaofl@m.scnu.edu.cn
  • 作者简介:李泽熙(2000-), 男, 硕士研究生. E-mail: 2022023502@m.scnu.edu.cn
  • 基金资助:
    国家自然科学基金(62375090, 52002135, 62374062); 广东省基础与应用基础研究基金(2024A1515140064); 广东省自然科学基金(2023B1515120071); 广东省科技计划项目(2023A0505050131); 广东省高校特色创新项目(2023KTSCX028); 广州市科技计划项目(2024A04J6456)

Preparation of Two-dimensional GaN and Its Photoelectric Properties Based on Liquid Metal Gallium

LI Zexi, LU Wenjie, WANG Chao, ZHANG Lu, LI Shuti, GAO Fangliang   

  1. School of Electronic Science and Engineering (School of Microelectronics), South China Normal University, Guangzhou 510631, China
  • Received:2025-05-15 Revised:2025-07-03
  • Contact: GAO Fangliang, professor. E-mail: gaofl@m.scnu.edu.cn
  • About author:LI Zexi (2000-), male, Master candidate. E-mail: 2022023502@m.scnu.edu.cn
  • Supported by:
    National Natural Science Foundation of China (62375090, 52002135,62374062); Guangdong Basic and Applied Basic Research Foundation (2024A1515140064); Natural Science Foundation of Guangdong Province (2023B1515120071); Guangdong Provincial Science and Technology Plan Project (2023A0505050131); Characteristic Innovation Project of Colleges and Universities in Guangdong Province (2023KTSCX028); Guangzhou Science and Technology Plan Project (2024A04J6456)

摘要: 二维氮化镓(GaN)因其既具有宽禁带半导体特性,又具有量子限域效应双重特征,在紫外光电子领域中具有广阔应用前景。然而,金属有机化学气相沉积(Metal Organic Chemical Vapor Deposition, MOCVD)和分子束外延(Molecular Beam Epitaxy, MBE)等常用方法制备二维GaN通常需要较高的生长温度、较长的制备时间和成本相对较高。针对上述关键挑战,本研究运用了液态金属镓具有低温下熔化和易氧化的特点,研发了一种高效、相对低温的二维GaN制备策略。该策略的核心步骤包括:首先,利用简单易行的旋涂剥离法,直接从液态镓表面提取获得非晶态氧化镓(Ga2O3);随后,通过氮化处理工艺,在相对较低的温度下(850 ℃),对非晶Ga2O3进行处理,成功实现了高晶体质量GaN的制备。研究结果表明:制备的二维GaN厚度约为2.2 nm,横向尺寸为厘米量级,晶体结构为六方纤锌矿结构。基于制备的二维GaN构建了光电导型紫外光电探测器件,器件性能测试显示:在5 V偏置电压和波长为325 nm的紫外光(光强密度为365 μW/cm2)照射下,器件展示出良好的响应度(4.14 A/W)和较高的探测率(1.02×1013 Jones)。本研究展示了基于液态金属镓可制备获得大面积的二维GaN材料,为开发低维高性能紫外光电探测器提供了参考借鉴。

关键词: GaN, 液态金属镓, 旋涂剥离法, 紫外探测器

Abstract: Two-dimensional gallium nitride (GaN) exhibits broad application prospects in the field of ultraviolet optoelectronics due to its dual characteristics of wide-bandgap semiconductor and quantum confinement effect. However, conventional synthesis methods for 2D GaN, such as metal-organic chemical vapor deposition (MOCVD) and molecular beam epitaxy (MBE), typically require high growth temperatures, prolonged processing times, and relatively high costs. To address these critical challenges, this work leverages the intrinsic properties of liquid metal gallium, its low melting point and ease of oxidation to develop an efficient, relatively low-temperature synthesis strategy for 2D GaN. The core steps of this strategy include: First, utilizing a straightforward spin-coating exfoliation technique to directly extract an amorphous gallium oxide (Ga2O3) from the surface of liquid gallium. Subsequently, subjecting the amorphous Ga2O3 to a nitridation treatment process at a relatively low temperature of 850 ℃, successfully achieving its conversion into high-crystalline-quality GaN. Characterization results demonstrate that the synthesized 2D GaN possesses a thickness of approximately 2.2 nm, a lateral dimension on the centimeter scale, and a hexagonal wurtzite crystal structure. Our research group constructed a photoconductive ultraviolet photodetector based on the prepared two-dimensional GaN. Device performance characterization revealed that under a 5 V bias voltage and illumination by 325 nm UV light (with an intensity of 365 μW/cm²), the device exhibited a responsivity of 4.14 A/W and a high detectivity of 1.02 × 10¹³ Jones. This study demonstrates the successful preparation of large-area 2D GaN material based on liquid gallium metal, providing a valuable reference for the development of low-dimensional, high-performance UV photodetectors.

Key words: GaN, liquid metal gallium, spin-coating exfoliation method, ultraviolet photodetector

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