Journal of Inorganic Materials

• Research Paper • Previous Articles     Next Articles

Preparation and Property Characteristics of Non-agglomerated HfO2 Nano Powders by Wet Chemical Method

WU Zhi-Hua1; JIANG Dan-Yu2; LIU Jian-Min1; JI Ya-Ming2; SHI Wei-Min1; ZHANG Cheng1   

  1. 1. Department of Electronic Information Materials; Shanghai University; Shanghai 201800; China; 2. Shanghai Institute of Ceramics; Chinese Academy of Sciences; Shanghai 200050; China
  • Received:2003-09-08 Revised:2003-11-03 Published:2004-09-20 Online:2004-09-20

Abstract: HfO2 nano powders were prepared by the chemical precipitant method. The influence of different preparation
parameters on the agglomeration was investigated by X-ray diffraction analysis (XRD), scanning electron microscopy (SEM), transmission electron microscopy
(TEM), BET surface area techniques and laser particle analyzer. Non-agglomerated orthorhombic, HfO2 powders with a size of about 25nm
can be obtained by controlling starting concentration and pH values of solution, adding surfactants, washing gels with alcohol and calcining
at 700℃. Orthorhombic HfO2 ceramics of 96% theoretical density can be prepared by sintering at 1800℃ for 2h in hydrogen. The results
show that there are both o-HfO2 and m-HfO2 in the sample, mainly o-HfO2.

Key words: chemical precipitant method, non-agglomerate, HfO2 nano powder, sinter

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