Research Status and Development of Superhard Nanocomposite Films

Abstract

Abstract: Superhard nanocomposite films are attracting more and more interests due to their excellent mechanical and chemical properties since S. Veprek et al. presented the concept in 1994. The concept, classification, superhard mechanisms, synthesis technologies and processes, properties, applications, and development of superhard nanocomposite films were reviewed in this paper.

Key words: superhard films, nanocomposite structure, CVD, magnetron sputtering

CLC Number:

O484

ZHAO Hong-Yu,FAN Qiu-Lin,SONG Li-Xin,SHI Er-Wei,HU Xing-Fang. Research Status and Development of Superhard Nanocomposite Films[J]. Journal of Inorganic Materials.

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