Preparation of Nano-TiO2 Thick Film and its Electrical Properities

Journal of Inorganic Materials

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Preparation of Nano-TiO₂ Thick Film and its Electrical Properities

WANG Jun; GAO Lian; SONG Zhe; ZHOU Wei

State Key Lab of High Performance Ceramics Superfine Microstructure; Shanghai Institute ofCeramics; Chinese Academy of Sciences Shanghai 200050 China

Received:1997-12-29 Revised:1998-01-15 Published:1998-12-20 Online:1998-12-20

Abstract

Abstract: Nano-TiO₂ and micro-TiO₂ thick films were prepared on a-Al₂O₃ substrates by silk netlithograph method, the measured film resistance of nano-TiO₂ was higher than that of micro-TiO₂in experimental temperature range, nano-TiO₂ film demonstrated more change as the O₂partialpressure changed. XRD and SEM were also used to characterize the stucture of the prepared films.

Key words: nano-TiO₂, resistance, gas sensitivity, sensor, thick film

CLC Number:

TF123

WANG Jun,GAO Lian,SONG Zhe,ZHOU Wei. Preparation of Nano-TiO₂ Thick Film and its Electrical Properities[J]. Journal of Inorganic Materials.

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Preparation of Nano-TiO₂ Thick Film and its Electrical Properities

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