Abstract: ZrO₂ and ZrO₂:CdS films were synthesized by sol-gel technique using re-crystallized ZrOCl₂·8H₂O as the starting material. The results show
that the concentration of ZrO₂ and thickness of films can influence the transmission property of ZrO₂ films. CdS nanoparticles can be well dispersed
in ZrO₂ film. The average size of CdS particles is 4～6 nm. The conclusion is: (1) the crystallization of ZrO₂ particles can influence the optical properties
and surface morphology of ZrO₂ films; (2) CdS nanoparticles incorporated in ZrO₂ films can restrain the crystallization of ZrO₂ and relatively smooth
ZrO₂:CdS film can be obtained.

Key words: ZrO₂, CdS nanoparticles, films