Abstract: The authers studied the effects of the frequency and temperature on the TiO₂-K₂O-LiZnVO₄ ceramic thin film elements’ humidity
sensing characteristics. During low rh range, the impedance of the elements decreases as the frequency or temperature increases, the humidity sensitivity decreases obviously
as the frequency increases or temperature decreases, and platforms appeare at the humidity sensing characteristic curves. During high rh range, however, the effects of
the frequency and temperature can be ignored, and the characteristic curves present excellent linearity. The polarization within the ceramic thin films was analyzed.
The polarization causes the insensitivity of micro-capacitance versus rh at low rh and low temperature. Consequently, the mechanism of how the polarization within the
ceramics resulted in the effects of frequency and temperature on the elements’ characteristics was interpreted in detail.

Key words: ceramic humidity sensitive element, frequency, temperature, polarization