Influence of Cu on Transport Properties of Thermoelectric Thin Film Fabricated via Magnetron Co-sputtering Method

doi:10.3724/SP.J.1077.2013.13385

Journal of Inorganic Materials ›› 2014, Vol. 29 ›› Issue (2): 215-219.DOI: 10.3724/SP.J.1077.2013.13385

• Research Letter • Previous Articles Next Articles

Influence of Cu on Transport Properties of Thermoelectric Thin Film Fabricated via Magnetron Co-sputtering Method

CAO Li-Li, WANG Yao, DENG Yuan, LUO Bing-Wei, ZHU Wei, SHI Yong-Ming，LIN Zhen

(Beijing Key Laboratory of Special Functional Materials and Films, School of Material Science and Engineering, Beihang University, Beijing 100191, China)

Received:2013-08-05 Revised:2013-09-16 Published:2014-02-20 Online:2014-01-17
About author:CAO Li-Li(1986-), female, candidate of PhD. E-mail: youyidiyi_04caihua@163.com
Supported by:
National Natural Science Foundation of China(50772005, 51002006); National High Technology Research and Development Program of China(2009AA03Z322); Fundamental Research Funds for the Central Universities and Key Laboratory of Photochemical Conversion and Optoelectronic Materials, TIPC, CAS

Abstract

Abstract: A simple magnetron co-sputtering method was used to fabricate Cu dispersed Bi_0.5Sb_1.5Te₃ thin films, and the co-sputtering method was beneficial to the preferential growth of Bi_0.5Sb_1.5Te₃ thin films along c-axis. Cu atoms were well-dispersed in the nano-structured materials. The electrical conductivity sharply increased with the increasing content of Cu due to the effect of Cu on transport property. For Cu target sputtering power of 20 W, a maximum power factor of 20 μW/(cm?K²) with an electrical conductivity of 15 × 10⁴ S/m at 355 K were achieved.

Key words: semiconductors, thin films, thermoelectric properties, magnetron sputtering

CLC Number:

TB34

CAO Li-Li, WANG Yao, DENG Yuan, LUO Bing-Wei, ZHU Wei, SHI Yong-Ming，LIN Zhen. Influence of Cu on Transport Properties of Thermoelectric Thin Film Fabricated via Magnetron Co-sputtering Method[J]. Journal of Inorganic Materials, 2014, 29(2): 215-219.

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Influence of Cu on Transport Properties of Thermoelectric Thin Film Fabricated via Magnetron Co-sputtering Method

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