Preparation of 1-3 Dimensional PZT-NFO Nanocomposite Films by Off-axis Magnetron Sputtering

doi:10.3724/SP.J.1077.2013.13363

Abstract

Abstract: Self-assembled nanocomposite Pb(Zr_0.52Ti_0.48)O₃-NiFe₂O₄ films were prepared on the (001)-oriented MgAl₂O₄ substrates by a 90° off-axis magnetron sputtering method. The influences of substrate temperature, argon over oxygen ratio and sputtering power on the structure and properties of PZT-NFO nanocomposite films were studied. The optimal growth conditions are substrate temperature of 800 ℃, argon over oxygen ratio of 1:1 and sputtering power of 160 W. XRD studies reveal that the PZT-NFO film is epitaxial along both the in-plane and out-of-plane directions, and the vertical lattice mismatch between the PZT phase and the NFO phase is very small. AFM and SEM analysis show that the PZT-NFO films have clear 1-3 dimensional nanocomposite structure, and the diameter of NFO nanorods is 80-150 nm. Further decreasing argon over oxygen ratio is beneficial for the formation of NFO. However, increasing RF power causes a transition from an 1-3 dimensional nanocomposite to a 0-3 dimensional chaotic structure. Magnetic measurement shows that the saturation magnetization of NFO phase is 120-160 kA/m, lower than that of bulk NFO phase, possibly due to the interfacial diffusion between the NFO and the PZT phases.

Key words: nanocomposite, magnetoelectric effect, magnetron sputtering, self-assembly

CLC Number:

TM271
O482

ZHANG Hui, MA Yong-Jun, WANG Yi-Cheng, WEN Dan-Dan, YE Fei, BAI Fei-Ming. Preparation of 1-3 Dimensional PZT-NFO Nanocomposite Films by Off-axis Magnetron Sputtering[J]. Journal of Inorganic Materials, 2014, 29(4): 371-376.

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