Preparation, Microstructure, and Conductive Properties of BaPbO3 Thin Films

doi:10.3724/SP.J.1077.2007.00138

Abstract

Abstract: Crackfree and small grain size perovskite-type ceramic BaPbO₃ conductive thin films were deposited onto Al₂O₃ substrates by a modified sol-gel method using ethylene diamine tetra-acetic acid (EDTA), citric acid, and tartaric acid as the complex chelate agent. XRD, SEM, and EDS tests, together with resistivity date,
show a good correlation among the Pb to Ba ratio, grain size, and sheet
resistance. Experimental results demonstrate that BaPbO₃ thin films with
homogeneous composition can be prepared by the method mentioned above.
Sheet resistance of BaPbO₃ thin films decreases with Pb to Ba ratio or grain size increases. The influence of heat treatment on sheet resistance is related with the thickness of BaPbO₃ thin films. The best electrical properties were obtained upon a rapid thermal anneal (RTA) at 700℃ for 10 min. Perovskite BaPbO₃ films with sheet resistance of 5.86Ω﹒□^-1 were derived from 20 spin-coating layers and annealed at 700℃ for 10min.

Key words: BaPbO3, ceramic, thin film, sol-gel, sheet resistance

CLC Number:

TQ174

LU Yu-Dong,WANG Xin,ZHUANG Zhi-Qiang. Preparation, Microstructure, and Conductive Properties of BaPbO₃ Thin Films[J]. Journal of Inorganic Materials, DOI: 10.3724/SP.J.1077.2007.00138.

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Preparation, Microstructure, and Conductive Properties of BaPbO₃ Thin Films

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