Structure and Optical Properties of CuInSe2 and Cu0.9In0.9Zn0.2Se2 Thin Films Deposited by One-step Radio-frequency Magnetron Sputtering

doi:10.15541/jim20140309

Abstract

Abstract:

CuInSe₂ (CIS) and Cu_0.9In_0.9Zn_0.2Se₂ (CIZS) thin films were deposited by Radio-Frequency (RF) magnetron sputtering process. X-ray diffraction (XRD) results indicate CIZS film deposited at 300℃ (CIZS-300) is (220) preferred orientation which is different from (112) preferred orientation of other films. Cu-poor and appropriate temperature are major factors for (220) preferred orientation of grains. The Raman spectra show a strong peak around 171 cm^-1 and a weak peak around 206 cm^-1, which corresponding to A₁ and B₂ modes. Substitution of Zn for Cu leads to a broadening and blue-shift of A₁ Raman mode. The band gap E_opt of CIZS film increases due to a reduced Se p-Cu d interband repulsion with Zn doping. Scanning electron microscope (SEM) measurement demonstrates that the surface morphology of CIZS is more compact and smoother than that of CIS thin films.

Key words: magnetron sputtering, CIZS thin film, Zn doping

CLC Number:

TQ174

WANG Wei-Jun, HE Jun, ZHANG Ke-Zhi, TAO Jia-Hua, SUN Lin, CHEN Ye, YANG Ping-Xiong, CHU Jun-Hao. Structure and Optical Properties of CuInSe₂ and Cu_0.9In_0.9Zn_0.2Se₂ Thin Films Deposited by One-step Radio-frequency Magnetron Sputtering[J]. Journal of Inorganic Materials, 2014, 29(11): 1223-1227.

Figures/Tables 6

Fig. 1 Chemical composition of CIS, CIZS theoretical value and their corresponding experiment results

Fig. 2 Normalized XRD patterns of CIS target, CIZS target and their corresponding thin films deposited at room temperature and 300℃

Fig. 3 Raman spectra of CIS and CIZS thin films deposited at with different substrate temperatures

Fig. 4 The transmittance of CIS and CIZS thin films deposited at RT and 300℃, respectively

Fig. 5 Eopt of CIS and CIZS thin films deposited at RT and 300℃, respectively

Fig. 6 SEM surface micrographs and cross-sectional image of CIS and CIZS thin films

References 16

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Structure and Optical Properties of CuInSe₂ and Cu_0.9In_0.9Zn_0.2Se₂ Thin Films Deposited by One-step Radio-frequency Magnetron Sputtering

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