不同退火方式对0.7BiFeO3-0.3PbTiO3薄膜的铁电性能及漏电流的影响

doi:10.3724/SP.J.1077.2011.01053

无机材料学报 ›› 2011, Vol. 26 ›› Issue (10): 1053-1057.DOI: 10.3724/SP.J.1077.2011.01053

不同退火方式对0.7BiFeO₃-0.3PbTiO₃薄膜的铁电性能及漏电流的影响

李海敏, 郭红力, 李雪冬, 刘果, 肖定全, 朱建国

(四川大学材料科学与工程学院, 成都 610065)

收稿日期:2010-12-08 修回日期:2011-01-17 出版日期:2011-10-20 网络出版日期:2011-09-20
作者简介:李海敏(1978-), 女, 博士研究生. E-mail: lucialee@126.com
基金资助:
国家自然科学基金(60771016)

Effects of Different Annealing Technique on the Ferroelectric and Leakage Properties of 0.7BiFeO₃-0.3PbTiO₃ Thin Films

LI Hai-Min, GUO Hong-Li, LI Xue-Dong, LIU Guo, XIAO Ding-Quan, ZHU Jian-Guo

(College of Materials Science and Engineering, Sichuan University, Chengdu 610065, China)

Received:2010-12-08 Revised:2011-01-17 Published:2011-10-20 Online:2011-09-20
Supported by:
National Natural Science Foundation of China (60771016)

摘要/Abstract

摘要： 利用溶胶-凝胶法在LaNiO₃/SiO₂/Si衬底上制备了0.7BiFeO₃-0.3PbTiO₃(BFPT7030)薄膜, 研究了快速退火及常规退火两种不同的后续退火处理方式对薄膜铁电性能及漏电流性能的影响. XRD测试表明, 经快速退火处理的BFPT7030薄膜结晶完好, 呈现出单一的钙钛矿相. SEM测试结果显示, 经快速退火处理的BFPT7030薄膜结晶充分, 但经常规退火处理的BFPT7030薄膜表面致密性较好, 且在升温速率为2℃/min时薄膜的晶粒更细小. 经快速退火处理的BFPT7030薄膜的铁电性能较为优异, 在升温速率为20℃/s时, 其剩余极化P_r为22 μC/cm², 矫顽场E_c为70 kV/cm, 并具有较小的漏电流. XPS测试结果表明, 经常规退火处理的BFPT7030薄膜其铁离子的价态波动较小.

关键词: 溶胶-凝胶, BiFeO₃-PbTiO₃, 薄膜, 快速退火, 常规退火

Abstract: 0.7BiFeO₃-0.3PbTiO₃ (BFPT7030) thin films were prepared on LaNiO3/SiO2/Si substrates by Sol-Gel process. The films were annealed by rapid thermal annealing technique (RTA) and conventional thermal annealing (CTA) technique, respectively. XRD patterns of the films indicate that BFPT7030 films annealed by RTA show a single perovskite phase and better crystallinity as suggested by stronger and sharper XRD peaks. SEM observations demonstrate that BFPT7030 films annealed by RTA are fully crystallized, but films annealed by CTA have a dense morphology and exhibits small grain size especially for film heated at rate of 2℃/min. Enhanced ferroelectric properties are observed in the films annealed by RTA. The film heated at rate of 20℃/s exhibits a remnant polarization of 22 μC/cm² with a low coercive field of 70 kV/cm. And lower leakage current density is observed in BFPT7030 films annealed by RTA as compared to BFPT7030 films annealed by CTA. XPS analyses demonstrate that the oxidation state of Fe ions is the coexistence of both Fe³⁺ and Fe²⁺ in the BFPT7030 films annealed by RTA and CTA, but less fluctuation of Fe³⁺ to Fe²⁺ exists in the BFPT7030 films annealed by CTA.

Key words: Sol-Gel, BiFeO₃-PbTiO₃, thin film, rapid thermal annealing, conventional thermal annealing

中图分类号:

TQ12

李海敏, 郭红力, 李雪冬, 刘果, 肖定全, 朱建国. 不同退火方式对0.7BiFeO₃-0.3PbTiO₃薄膜的铁电性能及漏电流的影响[J]. 无机材料学报, 2011, 26(10): 1053-1057.

LI Hai-Min, GUO Hong-Li, LI Xue-Dong, LIU Guo, XIAO Ding-Quan, ZHU Jian-Guo. Effects of Different Annealing Technique on the Ferroelectric and Leakage Properties of 0.7BiFeO₃-0.3PbTiO₃ Thin Films[J]. Journal of Inorganic Materials, 2011, 26(10): 1053-1057.

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不同退火方式对0.7BiFeO₃-0.3PbTiO₃薄膜的铁电性能及漏电流的影响

Effects of Different Annealing Technique on the Ferroelectric and Leakage Properties of 0.7BiFeO₃-0.3PbTiO₃ Thin Films

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