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无机材料学报

无机材料学报

• 研究论文 • 上一篇    

TiO2薄膜的液相沉积法制备及其性能表征

王晓萍; 于云; 高濂; 胡行方   

  1. 中国科学院上海硅酸盐研究所; 上海 00050
  • 收稿日期:1999-05-24 修回日期:1999-08-16 出版日期:2000-06-20 网络出版日期:2000-06-20

Preparation of TiO2 Thin Films by Liquid Phase Deposition Methods and their Properties

WANG Xiao-Ping; YU Yun; GAO Lian; HU Xing-Fang   

  1. Shanghai Institute of Ceramics; Chinese Academy of Sciences; Shanghai 200050; China
  • Received:1999-05-24 Revised:1999-08-16 Published:2000-06-20 Online:2000-06-20

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摘要： 采用液相沉积法（LPD）制备了透明TiO2薄膜，并研究了所制薄膜的形貌、结构和在紫外光照射下亲水性能的变化．结果表明，用此法制得的TiO2薄膜较为均匀致密，热处理前后的薄膜具有相似的亲水性能，在紫外光照射下亲水性能都有提高．热处理后的薄膜在紫外光照射一定时间后可与水完全润湿．

关键词: 液相沉积, TiO2, 薄膜, 亲水性

Abstract: nansparent TiO2 thin films were prepared by a liquid phase deposition method. The morphology, structure and the change of hydrophilicities under UV illumination of as-prepared films were studied. The result shows that thus prepared films axe dense and uniform, and exhibit a similar hydrophilicity whether the films are annealed or not. Their hydrophilicities are all increased by UV illumination. The films annealed can be entirely wetted by water after UV illumination for a certain time.

Key words: liquid phase deposition, TiO2, thin films, hydrophilicity

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