利用激光刻蚀技术提高Ba0.5Sr0.5Co0.8Fe0.2O3-δ膜的透氧能力

doi:10.3724/SP.J.1077.2009.09474

摘要/Abstract

摘要： 利用激光刻图机对Ba_0.5Sr_0.5Co_0.8Fe_0.2O_3-δ(BSCFO)透氧膜表面进行刻蚀，以提高膜表面的比表面，改善膜的氧表面交换能力，从而达到提高透氧量的目的。研究结果表明，激光刻蚀在膜表面形成宽150µm，深25µm的条纹，可以显著提高膜表面的比表面积。XRD谱显示，激光刻蚀不会引起 BSCFO相结构的变化。透氧量测试表明，激光刻蚀可以增大透氧量，十字交叉双面刻蚀效果更加显著。十字交叉双面刻蚀后，其透氧量比未用激光处理的样品提高了大约34%。

关键词: 透氧膜；激光刻蚀；比表面积；透氧量

Abstract: The surfaces of Ba_0.5Sr_0.5Co_0.8Fe_0.2O_3-δ(BSCFO) membranes were decorated by laser ablation treatment in order to increase the specific surface of the membrane surface, and laser ablation treatment could improve the ability of oxygen surface exchange and enhance the oxygen permeation flux of the membranes. The arc shape stripes with width about 150µm and depth about 25µm increase the specific surface of the membrane surface significantly, which were made by laser ablation treatment. XRD patterns show that the BSCFO phase structure is kept after laser ablation treatment. The oxygen permeation fluxes through the membranes after laser ablation treatment are enhanced, and laser ablation treatment with cross stripes pattern on both sides of the membranes has a signification impact on the oxygen permeation flux. The oxygen permeation flux through the membrane with cross stripes pattern on both sides is 34% higher than that through membranes without laser ablation treatment.

Key words: oxygen permeation membrane, laser ablation, specific surface, oxygen permeation flux

中图分类号:

TQ174

申梓刚，路朋献，胡行. 利用激光刻蚀技术提高Ba_0.5Sr_0.5Co_0.8Fe_0.2O_3-δ膜的透氧能力[J]. 无机材料学报, DOI: 10.3724/SP.J.1077.2009.09474.

SHEN Zi-Gang,LU Peng-Xian,HU Xing. Improving the Oxygen Permeability of Ba_0.5Sr_0.5Co_0.8Fe_0.2O_3-δ Membranes by Laser Ablation[J]. Journal of Inorganic Materials, DOI: 10.3724/SP.J.1077.2009.09474.

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